AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

7. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40

I

|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL. NVF353O f l Operating prs6sur range 2 pGiEon singb 20 -129 PSI S(1.5 -gkgF) 2 pssition double-15-128 P$l (1 -gkgflcm'?)

Dedicated Controller Series LC1 Uniaxial Type

Home position return direction is selectable. 1008 points (when step designation is actuated) Addressing Absolute and incremental used in combination Position designation range 0.00mm to 4000.00mm Speed designation range 1mm/s to 2500mm/s Acceleration/deceleration designation range Trapezoidal acceleration/deceleration 1mm/s2 to 9800mm/s2 Note) There are cases in which the position, speed

ZSE5/ISE5

Jf Sl.W') GNOI~1 : ~EDiM,> I OIlC\ ~SlW< ::HJ1eIma ~ __ _ ___ J !... ___ _ _ J !... _ _ __ J Precautions Construction/ Parts List Piping (DBe sure to apply a wrench to the metal seclion (17mm) during piping. Never apply a wrench to the resin section of the main unit. , ::g}Clean tube fittings by air-blow (0 remove foreign matter from inside.

Lubrication Equipment

Lube Unit ALDU600-l06 to 10, ALDU900-l12 to 20 A B C D E F G H J K L M N P Q R S Model Port size 3/4 283 296 424 424 476 67 77 85 90 100 43 10 57 51 16 ALDU600-l06 ALDU600-l10 ALDU900-l12 ALDU900-l14 ALDU900-l20 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1/4 1/2 615 615 682 419.2 209 1 1 1 250 125 33.2 33.2 710 670 20 700 230 120 222 1.17-19 Booster Lube Series ALB900 Standard

High Pressure Coolant Valve

80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

DIN (EN175301-803(C)) terminal Z With light/surge voltage suppressor *1 For AC voltage valves there is no S option.

AME

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) HA Maintenance space AT ID AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G AM I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 36 9 205 19 100 106 3 106 10 1 2 3 4 , AME450 Misc. 212 22 107 106 3 106 10 36 221

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

Clean Exhaust Filter

(Initial conditions) 200 0.05 32 SFE1 SFE3 Inlet pressure/Back pressure [MPa] 150 SFE5 0.04 25 100 SFE4 SFE7 95 20 0.03 50 10 0 0.02 0 100 200 300 400 500 600 700 800 Cylinder driving speed [mm/s] AN 0.01 AMC Example) Bore size: 32, Driving speed: 400 mm/s, Supply pressure: 0.5 MPaG 1. From the graph, exhaust flow rate is found to be 95 L/min (ANR). 2.

AME

It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Pneumatic Positioner IP300/IP3100

Steel) 4w 1P300.1P3100 DIMENSIONS MODEL 1P300 (Lever Type) l t I I I J J O

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ2-Z Series 10, 16 Air Cylinder 10-/1121-/22RoHS How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Rubber bumper (Standard) Air cushion Nil A 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location 2 pcs. 1 pc. n pcs.

VCB

4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector