Magnet: None, Mounting: Single Clevis, Bore Size: 40mm, Port Thread: NPT, Stroke: 300mm, Rod Boot: None, Lock Style: Lock on Both Sides Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Front Flange, Bore Size: 32mm, Port Thread: NPT, Stroke: 350mm, Rod Boot: None, Lock Style: Lock on Both Sides Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Basic Style, Bore Size: 100mm, Port Thread: Rc, Stroke: 400mm, Rod Boot: None, Lock Style: Lock on Both Sides Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Single Clevis, Bore Size: 40mm, Port Thread: Rc, Stroke: 150mm, Rod Boot: None, Lock Style: Lock on Both Sides Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Front Flange, Bore Size: 100mm, Port Thread: Rc, Stroke: 800mm, Rod Boot: None, Lock Style: Lock on Both Sides Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Basic Style, Bore Size: 40mm, Port Thread: NPT, Stroke: 75mm, Rod Boot: None, Lock Style: Lock on Both Sides Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: D (Double Clevis), Tube Material: Aluminum Tube, Bore Size: 50mm, Port Thread: TN (NPT), Stroke: 150mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: W (Lock Both Sides), Release Type: L (Locking)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 50mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: W (Lock on Both Sides), Release of Manual: L (Locking)

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: B (Basic Style), Tube Material: Aluminum Tube, Bore Size: 100mm, Port Thread: TN (NPT), Stroke: 500mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: W (Lock Both Sides), Release Type: L (Locking)

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

, 800 1300 12-CY3R40 40 Rc1/4 NPT1/4 G1/4 12-CY3R50 12-CY3R63 50 63 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special order.

Table of Contents

Fan motor Outlet thermometer Model Selection (Flow Capacity l/min (ANR)) HAA7 HAA15 HAA22 HAA37 Model Outlet side air (COOL AIR) 50C 70C 100C 1000 1500 700 2200 4000 1500 3300 6000 2200 5700 13000 Inlet air temperature 4300 Cooling side air Cooler Conditions: Outlet temperature 40C, Ambient temperature 32C, Air pressure 0.7 MPa Drain 14-15-1 2 Series HAA How to Order Precautions 15 10 D 1

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data Magnetically coupled rodless cylinder for transfer in clean environments. 8-17-1 2 A magnetically coupled rodless cylinder that can be used for transfer in clean environments Low particle generation: 1/20 Long stroke (Max. 700 mm) (compared

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Slide table Cylinder tube Special cylinder tube Long stroke (Max. 700 mm) A special cylinder tube using extruded aluminum material is employed.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Average speed Va mm/s 50 100 200 300 500 700 Average speed Va mm/s Collision speed V mm/s Note) Use average speed to calculate static moment.

Thermo-con/Rack Mount Type

It may be out of this range in some other operating conditions. 7 Thermo-con/Rack Mount Type Air-cooled HECR Series Cooling Capacity HECR002-A HECR-A Air-cooled Water-cooled HECR-W Model Selection Specific Product Precautions Options Optional Accessories Circulating fluid: Ethylene glycol 20% Circulating fluid: Tap water 800 800 700 700 Cooling capacity [W] Cooling capacity [W] Ambient temperature

Thermo-chiller/Rack Mount Type

For installation indoors, ventilation ports and a ventilation fan should be equipped as needed. 700 mm or more 300 mm or more Electrical Wiring Warning 1. Grounding should never be connected to a water line, gas line or lightning rod. Caution 1. Communication cable should be prepared by the customer.

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

SFOD-OMT0009CN

800 600 700 800 600 700 800 [mm/s] 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] 10 5 20 12 6 () [mm/s] 17 9 33 20 10 () LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] 24 16 8 () [mm/s] 39 26 13 () 108 No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200

JXCx-OMT0001CN

800 600 700 800 600 700 800 mm/s 500 250 1000 900 630 550 500 420 330 250 230 180 [mm/s] () 10 5 20 12 6 [mm/s] () 17 9 33 20 10 LEFS32 H A B [mm] 24 16 8 [mm] 600 700 800 900 1000 800 900 1000 800 900 1000 mm/s 1200 930 750 610 500 500 410 340 250 200 170 [mm/s] () 24 16 8 [mm/s] () 39 26 13 -108No.JXC-OMT0001CN-C LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 mm