CM2

7 B 0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

Thermo-con/Rack Mount Type

supply connector 104 242 379 429 63 Communication connector 0 247 226 206 191 149 148 0 24 0 24 Circulating fluid inlet Rc3/8 Circulating fluid outlet Rc3/8 0 59 326 1.

MGG

9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

CXWM/CXWL

0 !1 !2 !3 !4 !5 !6 !7 !8 !

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

8 ( 9 3 . 9 ) 5 . 8 3 2 ( 3 7 . 1 ) 4 4 ( 2 / 1 8 / 3 4 / 1 6 0 N 0 0 4 F L A N 5 3 . 3 ) 5 8 ( 0 7 . 9 ) 5 . 6 4 2 ( 1 8 . 1 ) 6 4 ( 4 / 3 0 0 5 F L A N 4 5 . 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 / 1 1 4 / 1 1 0 0 9 F

Modular F.R.L. Unit

0.15 0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC60 AC30 0.25 0.25 Set point Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2 0.15 0.15 0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC40 0.25 Set point Outlet pressure MPa 0.2 0.15 0 0

MHZ2/MHZJ2

5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 5 5 8 8 10 10 12 12 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.5 0 +2.5 0 MHZ2

Best Pneumatics Vol. 14

0 !1 Drain q r e w t i u y o !0 !

EXxx-OMN0027CN

4 3 2 1 0 Byte 0 0 Bit No. 0 1 1 1 2 1 3 1 4 1 5 (0) 6 1 7 1 2 7 6 5 4 3 2 1 0 Byte 1 0 1 Bit No. 0 1 1 1 2 (1) 3 1 4 1FREEZE 5 1SYNC 6 (0) 7 1 3 7 6 5 4 3 2 1 0 Byte 2 0 0 0 0 0 0 0 Bit No. 06 (0) 7 1 PROFIBUS DP Byte 3 PROFIBUS FFh ID Byte 45 IDEX600-SPRA ID 1411h -72No.EX-OMN0027CN-D Header 7 6 5 4 3 2 1 0 Byte 6 0 0 0 0 1 1 0 1 Bit No. 07 0Eh(13 ) System diag.1 7 6 5 4 3 2 1

NCA1

CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

Modular F.R.L. Unit

0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC60 AC30 0.25 0.25 Set point Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2 0.15 0.15 0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC40 0.25 Set point Outlet pressure MPa 0.2 0.15 0 0 0.2

2 Phase Stepper Motor/Without Motor Brake Series LXS

depth 4 4H9 +0.030 0 depth 4 L-M6 Refer to Cross section C-C.

Digital Flow Switch

to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.

NCA1

CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

2/3 Port Valve

Model/Valve Specifications OUT Max.operating presure differential (MPa) Flow rate Orifice size (mm) Port size Rc(PT) Max. system pressure (MPa) Proof pressure (MPa) Weight (g) Cv Effective area (mm2) Model IN 2 0 VXA2132 0 VXA2122 0 VXA2132 0 VXA2232 0 VXA2242 0 VXA2252 0 VXA2262 0 VXA2232 0 VXA2242 0 VXA2252 0 VXA2262 0 VXA2262 0 6 1.0 0.5 1.0 1.0 0.33 0.61 0.33 3 4.5 3 VXA212 1 8 (6A) 11

42

TURN COM VQ4000 VQ5000 LOCK Caution Terminal block marking Model A COM B T Do not apply excessive torque when turning the locking type manual override. (0.1 Nm or less) VQ 4 5 10 0 1 A side COM VQ 4 5 20 0 1 A side COM B side VQ 4 5 3 4 5 6 0 0 1 A side COM B side Note 1) There is no polarity. It can also be used as COM.

CL

0 !1 !2 !3 !4 !5 !6 !7 !8 !

0.5

0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance

Table of Contents

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

LEF-OM002xx

Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/