Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

ML1C

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Flow Characteristics/Weight C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Operating pressure range (MPa) Port size Grommet DIN terminal 0.10 0.13 0.13 0.10 0.13 0.13 0.13 0.13 0.13 0.13 0.41 0.32 0.32 0.41 0.32 0.59 0.32 0.32 0.59 0.32 2 3 2 3 2 3 VKF33 VKF33 Y VKF33 E VKF33 V VKF33 W VKF334 VKF334Y VKF334E VKF334V VKF334W 0.67

EXxx-OMN0027CN

PLC H.T. ) Enable (SC_MonSs) 1 Disable Enable 2 1 2 (OC_Mon) Disable Enable (Inrush) 100msec 3 Disable 0.1 ms 1.0 ms 4 (Filter_T) 1.0 ms 10 ms 20 ms 1.0 ms 15 ms 5 (SigExt_T) 15 ms 100 ms 200 ms Enable Val165000 4 ON 3 ON/OFF (Counter) 6 Disable 1(EX600-DXPC1EX600-DXNC1) 22 OFF 0.5 mA ()OFF 0.5 mA 3 OFF 0.5 mA 31 4x1000 -54No.EX-OMN0027CN-D No. (H.T.

VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

DOC1003626

8 0x00,0xC8 Information of 0001h (Circulating fluid flow rate) 0x01C2 0,1,C,2 0x01,0xC2 Information of 0002h (Circulating fluid discharge pressure) 0x002D 0,0,2,D 0x00,0x2D Information of 0003h 0x00C8 0,0,C,8 0x00,0xC8 (Circulating fluid electrical conductivity)*1 Information of 0004h (Status flag) 0x0011 0,0,1,1 0x00,0x11 Information of 0005h (Alarm flag 1) 0x0 0,0,0,0 0x00,0x00 Information

Copper-free Actuators

speed controller 1.3-56 20-CJ2R Direct mount Free mount cylinder Series C(D)U 2.1-4 20-CU Standard SCUl 2.1-24 20-CUK Non-rotating rod Pin Cylinder Series C(D)JP 1.2-2 20-CJP Double acting SCJPl 1.2-8 20-CJP Single acting Large bore size cylinder Series C(D)S1 Standard SC51l 1.10-2 20-CS1N Fine lock cylinder Series C(D)L RB Standard SCLAl 3.1-33 20-CLA J Cylinder with lock Series C(D)NA

A

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PA PP 1(P) 2 2(A) 1 1/2 PP = approx.

Pin Clamp Cylinder Series CKQ/CLKQ

(Example) Nil Lead wire length 0.5 m 3 m L 5 m Z None N Applicable for the connector type (D-C) only. Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-A73(C)(H)/A80C Solid state switch: Manufactured upon receipt of order as standard.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

dr to the current leakage llowing throuth the C-R element.

AC Servo Motor Driver (MECHATROLINK-III type)

It is necessary to set it on the PLC side according to the kind of PLC. 35 - 6.3 The recommended value of the parameter [LEY] LEY25/ LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

3 Port Air Operated Valve Series SYJA300

N.O. 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Effective area (mm2) Pilot port size Type of actuation Port size SYJA312-M3 SYJA322-M3 SYJA314-M5 0.41 0.18 0.086 0.35 0.33 0.086 Body ported N.C. N.O. N.C.

MLU

MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

ITV0000

Temperature characteristics Operating temperature range 0 to 50C (with no condensation) Equivalent to IP65 Enclosure Connection type Built-in One-touch fitting Metric size z, x, c: 4 For single unit Inch size z, x, c: 5/32" Connection size Metric size z, c: 6, x: 4 Manifold Inch size z, c: 1/4", x: 5/32" Weight Note 1) 100g or less (without options) Note 1) Indicates the weight of a single

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

LH 0.2 C B W W D E d d D E LY MM MM 4-LD Width across flats G Width across flats G LT LT NA NA Y X Y X LX B S + Stroke LS + Stroke ZZ + 2 strokes (mm) Bore size (mm) LD LH LS LT LX LY A a B B C d E F G GA J K M MA MM NA D H 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 9 47 168 8 44 77 23 10 60 60 44 18 45

5 Port Solenoid Valve Series SQ1000/2000

B Note 2) Note 1) Except double (latching) C Note 2) Note 1) The function symbol is D for double solenoid specifications.

VVX31/32/33

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

VXA21/22

The right side of the common port provides plug. 4.1-75 VVXA31/32 Dimensions Stations 2 3 4 5 6 7 8 9 10 Model L L1 L2 L1 L2 96 84 126 108 132 120 172 154 168 156 218 200 204 192 264 246 240 228 310 292 276 264 356 338 312 300 402 384 348 336 448 430 384 372 494 476 VVXA31 VVXA32 Symbol Model M 45.5 50.5 N 69 76 K 6 9 G 24 25 H 30 40 J 36 46 F 33 34 C 9 10 D 22 24 E 59 66 B 20 22 A 40 44