70pvpump (1) 5 to 55 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 VC Outlet air atmospheric pressure dew point (C) 20 VDW Inlet air flow rate l/min (ANR) (2) 625 62 125 250 375 VQ Outlet air flow rate l/min (ANR) 50 100 200 300 500 VX2 Purge air flow rate l/min (ANR) (3) 12 25 50 75 125 VX Inlet air pressure (MPa) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080
flats 19 OUT Purge air for dehumidification IDG 30, 50, 60, 75, 100 Dimensions (mm) A IDG3, 5, 10, 20 A IN IDG1 Series IDG Series IDG Comes with pre-filter as detailed left + regulator AR.
Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)
rate l/min (ANR) (SCFM) Note 3) 12 (0.42) 25 (0.88) 50 (1.8) 75 (2.6) 125 (44) Inlet air pressure MPa (psi) 0.7 (101) Inlet air temperature C (F) 25 (77) 25 (77) 25 (77) 1l/min (ANR) (0.03SCFM) {inlet air pressure at 0.7MPa} (101psi) Inlet air saturation temperature C (F) Ambient temperature C (F) Dew point indicator purge air flow rate Port size (nominal size B) 1/4, 3/8 1/8, 1/4 Weight
to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature
to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature
(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)
(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)
Magnet: Built-in, Mounting: Foot, Bore Size: 20mm, Stroke: 125mm, Rod End Thread: Female Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket
Magnet: Built-in, Mounting: Foot, Bore Size: 20mm, Stroke: 25mm, Rod End Thread: Male Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket
(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)
Magnet: Built-in, Mounting: Front Flange, Bore Size: 25mm, Stroke: 50mm, Rod End Thread: Male Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket
NBR, Stainless steel Tool steel Retaining ring for hole type C Note 1) 3/16", 5/16", 3/8", 1/2" are made of POM, stainless steel, brass (Electroless nickel plated).
Use the appropriate pliers (C-type snap ring mounting tool) for installation and removal of the snap ring. 2. Take precautions even when using the appropriate pliers (C-type snap ring mounting tool). The snap ring may slip off the end of the pliers (C-type snap ring mounting tool) and spring out, causing bodily injury or damage to nearby equipment.
Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]
Number of auto switches Without auto switch C 16 ZCUK D 20 S 1 pc. C S D 16 D 20 ZC UK M9B With auto switch Auto switch Built-in magnet Nil Without auto switch Style (Tubing method in vacuum side)/ (Rod end shape) Refer to the table below for applicable auto switches.
Interactive input display Programming with the same language as PC software ACTUATOR & CONSTRUCTION SYSTEM L c /BS HOLD STOP CONTROLLER POWER ALARM L R UP ENT DOWN /ESC MODE Able to execute operations such as programming, test runs and parameter changes, which up until now have been performed from a PC.
How to Order Manifold Assemblies (Example) How to Order Valves Example (SZ3000, positive common with power supply terminals) SZ3 5 1 C6 LOZ 60 Double solenoid SZ3260-5LOZ-C6 (3 sets) Single solenoid SZ3160-5LOZ-C6 (2 sets) Type of actuation Supply/Exhaust block (U side mounting) 1 2 3 4 5 A B C 2 position single solenoid 2 position double solenoid 3 position closed center Switch specifications
Bore Size: Ø32, Thread: NPT, Stroke: 75mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Speed Control Type: Right Angle, Applicable Tubing: 5/16", Suffix: Required Selection w/Speed Control
Bore Size: Ø50, Thread: NPT, Stroke: 75mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Speed Control Type: Right Angle, Applicable Tubing: 3/8", Suffix: Required Selection w/Speed Control