High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Clean Rodless Cylinder Series CYP

e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Model Selection 1

250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500 700 900 10 500 700 900 10 700 1,000 Flow rate Q l/min (ANR) How to read the graph The sonic range pressure to generate a flow rate of 500 l/min (ANR) is P1 0.14 MPa for a 6 orifice (VX2 4), and P1 0.3 MPa for a 4.5 orifice (VX23). 3 2 For Saturated Steam [663] (179) Upstream

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

EX500-GPR1A.eng

BF SOL RUN Display Description NOTE When connecting manifold valve only without connecting Input unit manifold, LEDs of COM A D do not light. To make them light, connect a terminal plug to the unused connector of SI unit ( "C1" or "0" ). Settings for display Turns on: COM D is receiving data. Turns off: COM D has no received data. Turns on: COM C is receiving data.

VY511, VYU5

Controller (VYU5-D) External appearance of exclusive controller RUN1 STOP START SEL. SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 4-4-27 Series SYJ500

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

Regulator for 2 MPa ARX 20

300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure

Digital Flow Switch Series PFA For Air Series PFW For Water

Size (port size) For Air Series variations Flow rate Remote type Output specifications Port size (Rc, NPT, G) Integrated measurement Analog output Accumulated display type Switch output pulse output 1/8 1/4 3/8 1/2 11/2 1 2 Display unit Sensor unit range l/min PFA510 550 511 521 551 PFA710 750 711 721 751 703H 706H 712H P P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200

VNH

Gasket material A B NBR seals FKM seals Rated voltage Nil Air operated 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Valve size Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1 2 3 4 Rc Rc Rc Rc1 10A 15A 20A 25A 1 2 3 4 4

Interface Regulator for VQ4000 5 Port Solenoid Valve

400 600 800 1000 1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/

10-cls-e

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

90

Flow Rate Characteristics Relief Characteristics IR1020-01-A Supply pressure: 0.7 MPa IR1020-01-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate:

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

2 Slide screw 0.05 Without motor brake Series LXF 30 Direct acting guide Ball screw 0.03 80 3 100 0.05 Slide screw 200 2 Guide rod type Series LXP 200 3 0.05 Slide screw 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 Slide table

Fieldbus system Ethernet POWERLINK compatible SI unit

code, Plug, Straight 5 m, SPEEDCON compatible EX9-AC010EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ: Cable with M12 connector

AC Servo Motor Driver (SSCNET /H Type)

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V