type snap ring for shaft C type snap ring for shaft C type snap ring for shaft Return spring 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 Clear anodized Clear anodized 20, 32 only 20, 32 only Nickel plated Nickel plated Hexagon socket head set screw Hexagon socket head set screw 20 only Nickel plated 20 only Hexagon socket head plug Spring pin Wear ring
[February 2020] C: Contents are added. [February 2021] D: Contents revised in several places.
Blanking cap (65) A 2 x Rc (d) (34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70
Controlled flow 0.2 0.3 0.4 0.2 0.2 0.3 0.1 0.2 0.1 0.2 C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed.
0.2 0.1 0.2 C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed.
to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.
Product weight Model LEJS100 Stroke [mm] 200 300 400 500 600 800 1000 1200 1500 Product weight [kg] 17.6 19.7 21.8 23.9 26.0 30.2 34.3 38.5 44.8 -7- 1.3 Construction *Motorless type Component parts Maintenance parts/Grease pack No. Description Material Remarks Apply for Order No.
9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1
Both directions Lock direction MXW MXP Stroke Bearing Standard stroke (mm) Long stroke (mm) Bore size (mm) MG Model MGP 20 75, 100, 125, 150, 200 250, 300, 350, 400 MLGCM Slide bearing 25 350, 400, 450, 500 MGQ 75, 100, 125, 150, 32 350, 400, 450, 500, 600 MLGCL Ball bushing bearing 200, 250, 300 40 350, 400, 450, 500, 600, 700, 800 MGG * Middle strokes and short strokes other than shown
Material Diaphragm Poppet Body Brass Code Option B S SH Gauge port (Extra bottom outlete, Inletr, Outlett) 316 SS 316 SS Specification Standard (Cv: 0.09) High flow (Cv: 0.15) Code 316 SS Hastelloy C-22 Hastelloy C-22 No code HF Pressure gauge 1) Code Ports psig/bar unit MPa unitunit No gauge port Seat material Material Code S, SH V V V V V No code Ports No pressure gauge (Connections: 1/
Connections NPT 1/4 inch 1/4 inch compression Code 4 4T Seat material Code Material Viton (Standard) PTFE Kalrez Material No code TF KZ Body Brass Nozzle Diaphragm Code B S SH Gauge port (Inlete, r) 316 SS 316 SS Pressure gauge 1) 316 SS Hastelloy C-22 Hastelloy C-22 Code psig/bar unit MPa unit Pressure gauge unit 2) No gauge port No code Ports Unit psig/bar MPa Code No pressure gauge (Connections
For 200 mm wafer For 300 mm wafer 529
Setting of the contact input signal 1 delay timer of reading Setting range: 0 to 300 seconds to Setting/Checking: Contact input signal 1 OFF detection timer 35. Press the [SEL] key once. Setting screen of contact input signal 1 OFF detection timer is displayed on the digital display. PV SV 36.
Speed Controller Cylinder Solenoid valve Tubing Silencer Maximum return speed (mm/s) 100 200 300 6 ASD230F CJ2 VJ500 TU0604 1 m AN11001 10 Mounting 16 Cylinder size Caution 20 1. If installing flow controls to valve ports, interference may occur with the fittings. Please consult the catalog before installing.
AD27-A With bowl guard AD27-C-A AD37-A AD47-A Normally open (N.O.)
Therefore, if the target temp. is 23.0 C and 1.5 C is set in this item, the warning [WRN] arises when temp. lowers 21.5 C. H i g h T e m p . 8. High Temp. Cutoff Setting range : 11.0 to 70.0 C Min. increment : 0.1 C Indicated content : High temp. cutoff by internal temp. C u t o f f M O D E < 7 0 . 0 C sensor (Ex. : 70.0 C).
69 26 M48 x 1.5 t +0.15 0 m 40 NTH-040 22 25.4 21 10 M16 x 1.5 C 50 NTH-050 27 31.2 26 12 M20 x 1.5 Df8 63 H 0 0.15 NTH-060 32 37 31 14 M24 x 1.5 C-series 80 NTH-080 41 47.3 40 17 M30 x 1.5 C L 100 NTH-100 55 63.5 54 20 M39 x 1.5 Material: Rolled steel Bore size (mm) C L m t H Df8 Part no. 32, 40 0.016 0.043 16 CDH-04 1 62 2.5 4.8 14 50 0.016 0.043 20 CDH-05 1 76.5 3.5 4.8 18 0.016 0.043
1 Support spring Stainless steel (2) Fluid temperature C Ambient temp. C Fluid Air Liquid Non-leak Vacuum (3) (3) Solenoid Specifications Air (Std.) Oil (Std.)