MXH D-M9 D-F9W MX MTS W ( ): Denotes the values of D-A93.
250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure
Enter together in order, counting from station 1 on the D side.
Wiring Electrical entry Auto switch type Electrical entry from inside 3-wire D-F9P B Solid state switch D-F9 In-line 2-wire D-F9B 3-wire D-F9NW,D-F9PW In-line 2 color indication solid state switch D-F9 W 2-wire D-F9BW 3-wire D-F9NWV,D-F9PWV Perpendicular B 2-wire D-F9BWV Install auto switch as shown in figure below.
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port thread type: Rc,
Bore Size: 100mm, Port Type: Rc (PT), Stroke: 200mm, Lock Position: H (Rear Locking), Manual Override: L (Locking), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Bore Size: 25mm, Port Type: Rc (PT), Stroke: 200mm, Lock Position: H (Rear Locking), Manual Override: L (Locking), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Bore Size: 32mm, Port Type: Rc (PT), Stroke: 200mm, Lock Position: H (Rear Locking), Manual Override: L (Locking), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Bore Size: 40mm, Port Type: Rc (PT), Stroke: 200mm, Lock Position: H (Rear Locking), Manual Override: L (Locking), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Bore Size: 50mm, Port Type: Rc (PT), Stroke: 200mm, Lock Position: H (Rear Locking), Manual Override: L (Locking), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Bore Size: 63mm, Port Type: Rc (PT), Stroke: 200mm, Lock Position: H (Rear Locking), Manual Override: L (Locking), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Bore Size: 80mm, Port Type: Rc (PT), Stroke: 200mm, Lock Position: H (Rear Locking), Manual Override: L (Locking), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Air cushion, Operating Pressure(
Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: M9BW,
Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: M9BW,
Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: M9BW,
Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: M9BW,