Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

The amount of water is 18.2 g/m3. 7. Trace the arrow mark, starting with F for cooling temperature 25C (pressure dew point 25C) to find the intersection G on the pressure characteristic line for 0.7 MPa. 8. From the intersection G, trace the arrow mark to obtain the intersection H on the vertical axis. 9.

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

05-hyg-e

Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) Piston seal NBR 20 25 32 HYG20-PS HYG25-PS HYG32-PS !5 !6 !7 18 !9 Rod seal NBR (FKM can be selected.) O-ring (Rod end) NBR (FKM can be selected.) Set of left nos. !5, !6, !7, !9. Place the seal material symbol in .

JXCx-OMT0032CN

CN1IF(CONT) 18 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SWOFF(LEC)(LEC) (LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.

10-my3a-e

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) For instructions on how to replace replacement parts/seals, refer to the operation manual. 105 Mechanically Jointed Rodless Cylinder/Basic Type Series MY3A 20, 32, 50 Replacement Procedure is P.312 Construction !4 !5 !6 !0 @2 o The numbers are the same as the "Construction" of the MY3 series catalog (CAT.ES20-165).

10-my3b-e

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) For instructions on how to replace replacement parts/seals, refer to the operation manual. 107 Mechanically Jointed Rodless Cylinder/Basic Type Series MY3B 20, 32, 50 Replacement Procedure is P.312 Construction !4 @7 !5 !0 @2 !6 o @6 The numbers are the same as the "Construction" of the MY3 series catalog (CAT.ES20-165).

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP12 Z 3 Metal stopper Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control

CRQ2

Use formula (2) for vane type sizes 50, 80, 100 and the rack-and-pinion type. P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Use formula (2) for vane type sizes 50, 80, 100 and the rack-and-pinion type. P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

ZSE30/ISE30

76 g 81 g Weight Without lead wire with connector 40 g 38 g 43 g 16-2-5 6 Series ZSE30/ISE30 Setting Pressure setting Press the button.

Clean Exhaust Filter

7 g 12 g 17 g Plug-in 3 g 6 g 11 g 16 g One-touch fitting 5.5 g 8 g 16 g 24 g Bracket weight 1.2 g 2.5 g 3.5 g 5.5 g Applicable tubing material Note 6) (One-touch fitting type) PFA, Polyolefin, Soft polyolefin, Polyurethane Replacement period 2 years or when back pressure reached 0.1 MPa When the system fails to operate normally due to clogging Packaging Antistatic double packaging

SL5200

Reference: Bureau of Industry and Security (USA) http://www.bis.doc.gov/ 1) 2B350.g.2 (1) Product name : Regulator, Diaphragm valve (2) Body material : Hastelloy (3) Connection size : 1/2 inch or more 2) 2B999.g (1) Product name : Regulator, Back pressure regulator, Diaphragm valve, Check valve, Vacuum generator module (integrated with valve

VQC

Bore size Series CJ2 Pressure 0.5 MPa Load ratio 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Series MB, CA Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load ratio 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQC1000



the External Pilot VEX1 3 3 B A M5 G 1.

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 10 M G F 63 50 Y59B Number of auto switches 2 pcs. 1 pc. n pcs. 10 Clean series Relief type Nil S n Bore size (mm) Port type Auto switch Type Rc NPT G Bore size Symbol Nil TN TF Z73 Nil Without auto switch Reed switch 40, 63, 100 Solid state Y59A,Y59B The minimum stroke for auto switch mounting and operating range are the same

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

CE marked CE marked Standard (EMC directive / RoHS directive), (EMC directive / RoHS directive) UL (CSA) Weight 170 g 175 g 170 g 1: All unused connectors must have a seal cap fitted. -32No.EX-OMX1011 Dimensions 26 EX600-ED2 EX600-ED2-2 26 -33No.EX-OMX1011 EX600-ED2-3 -34No.EX-OMX1011 EX600-ED3 EX600-ED3-2 -35No.EX-OMX1011 EX600-ED3-3 -36No.EX-OMX1011 EX600-ED4/ED5 26 EX600-ED4/ED5-2 26 -

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

(g) Model Min.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

5 Port Air Operated Valve Series VFA3000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF