Compact

0.05 ST 5, 10ST 15, 20 ST 5, 10 ST 15, 20 0.00 0 20 40 60 0.00 0 20 40 60 0.00 0 20 40 60 Load [N] Load [N] Load [N] ST = Stroke 14 MXZ Series Auto Switch Mounting Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Mounting D-M9mV D-M9mWV D-M9mAV D-M9m D-M9mW D-M9mA (1) Bottom mounting 5 10*2 15*1 15*1 (2) When mounting an auto switch into the groove from the top*3 15 15 30

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Do not use in an environment where oil and chemicals are used. Maintenance Caution 1. Perform periodic inspection. 249

Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Sine Rodless Cylinder Series REA

Series REAL Size: 10, 15, 20, 25, 32, 40 To ensure a permanent path. When smoother operation is required, even with an eccentric load. Stable operation is possible even with an eccentric load, through the use of a ball bushing. Series REAH Size: 10, 15, 20, 25, 32 The use of a linear guide makes possible a large load, large moment and high precision.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 5.5 6 6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

CS1

DSM-60S DSM-75S Cast iron DSM-75S(H) Piston r t y u i o !

Electric Actuator / Slider Type 《 AC Servo Motor 》

Positioning repeatability [mm] Basic type:0.02/High precision type: 0.01 Lost motion [mm] Basic type:0.1 or less/High precision type: 0.05 or less Lead [mm] 20 12 6 24 16 8 30 20 10 Impact resistance/vibration Resistance [m/s2] Note 4) 50/20 Drive method Ball screw(LEFS)Ball screw + Belt(LEFSL R) Guide type Liner guide Operating temperature range [] 5 to 40 Operating humidity range [%RH]

ZSE30/ISE30

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Single Axis Electric Actuator Series LJ1S Series LJ1S Slider Guide Lead screw lead mm Mounting Page Model Series Guide type Motor type orientation Slide screw 20 20 20 20 20 20 LJ1S10 LJ1S20 LJ1S30 LJ1S10 LJ1S20 LJ1S30 88 Standard 90 motor 92 Slider guide LJ1S Horizontal 94 Standard 96 motor 98 Option specifications Page 100 Made to Order 101 Dust seal specification 116 TSUBAKI CABLEVEYOR

MHC2

is at least 10 to 20 times the workpiece weight.

MHC2

is at least 10 to 20 times the workpiece weight.

MXH

1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

AMF

20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style Standing style 60 6BFlange How to Select Max.

SYJA3000

) 3 (R) 5 (R) 1 (P) 3 (R) Note 1) Impact resistance: No malfunction resulted from the impact test using a drop impact tester.

Wireless System

An application which could have negative effects on people, property, or animals requiring special safety analysis. 4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a mechanical protective function, and periodical checks to confirm proper operation. 1.

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 20 3 25 3 2 1.6 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 35 4 50 4 3 4.5 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2 ZP3P Series How to Order Vertical vacuum inlet

VXA21/22

20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.