HRL

water, Deionized water1 Set temperature range [C] CH1: 15 to 25/CH2: 20 to 40 Cooling capacity2 [kW] 9 18 19 18 26 18 Heating capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated flow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55

Lightweight and Compact

method PID control Ambient temperature1 C 5 to 45 HRW HECR HEC Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 9.0/10.5 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 HEB Circulating fluid system HED Rated flow 50/60 Hz (Outlet)6 L/min 29/45 Maximum flow rate 50/60 Hz L/min 55

energy saving effect

temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless steel, Copper (Heat exchanger brazing), Bronze, Brass Resin PTFE, PU, FKM, EPDM, PVC, NBR, POM, PE, NR Supply side pressure range MPa 0.3 to 0.5 Supply side temperature range C 5 to 40 Required flow L/min 25 30 50 55

53

Conditions DC inverter Inverter fan pump Low High Motor rotation rate (For air-cooled type) Inverter pump Power reducing effect of the inverter pump Inverter pump Current model HRSH090 35 L/min 55 L/min Inverter Power consumption (Pump only) Power consumption (Pump only) pump 0.6 kW 1.1 kW Tank Tank 55 L/min 35 L/min 35 L/min 0.3 MPa 35 L/min 0.3 MPa Users equipment Users equipment The motor

Slider Type Ball Screw Drive/11-LEFS Series

Measuring Conditions Description Laser dust monitor (Automatic particle counter by lightscattering method) Measuring instrument Minimum measurable particle diameter 0.1 m Suction flow rate 28.3 L/min (ANR) Sampling time 5 min Setting conditions Interval time 55 min Sampling air flow 141.5 L (ANR) Clean bench (ISO Class 5 equivalent) Vacuum suction from vacuum port Laser dust monitor Particle

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

supply voltage [V] 100 to 120 VAC (50/60 Hz), 200 to 230 VAC (50/60 Hz) Reference page Page 607 533 11-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55

Series 11-MXJ Air Slide Table

J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A Model G GA H I J K M Z ZZ 11-MXJ8-5 11-MXJ8-10 11-MXJ8-15 11-MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 Other dimensions are the same as standard model (Series MXJ). 19 28 20 8 25 39.5 54.5 48 55 829 Air Slide Table 11-MXJ Made to Order Air

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1112 B Diaphragm Valve for Ultra High Purity Manually operated type Series AZ3652 & 4652 inch (mm) Dimensions AZ3652 & 4652 Ports: 2PW (Welded) Ports: 2P (Machined) 1.5 (38) 1.5 (38) BAR STOCK BODY Note) FORGED BODY 0.44 (11.2) 2.17 (55) 2.17 (55) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A A Connections: TW Connections: TW 1.0 (25.4)

Series IDU provides a stable supply of dry air even under high demand conditions with an inlet air temperature of 55 C. Improved corrosion resistance with the use of stainless steel, plate type heat exchanger , Protects penumatic equipment from moisture , Rated inlet air temperature: 55 C , Refrigerant R134a(HFC), AIR DRYER, OTHERS, IDU DRYER/AFTERCOOLER, IDU OTHER SIZE(MISC.

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, VQ5000, VALVE, VV5Q51/55 MANIFOLD, RM, VV5Q51/55 BASE MT 1/2, 9.47987 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, VQ5000, VALVE, VV5Q51/55 MANIFOLD, RM, VV5Q51/55 BASE MT 1/2, 14.33004 lb

5 to 55 20312560.7252525?

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, VQ5000, VALVE, VV5Q51/55 MANIFOLD, RM, VV5Q51/55 BASE MT 1/2, 20.38178 lb

5 to 55 15111100110.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.43(0.51)

5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

5 to 55 20312560.7252525?

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, QP, VV5Q51/55 BASE MT 3/8, 7.71617 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, VQ5000, VALVE, VV5Q51/55 MANIFOLD, QM, VV5Q51/55 BASE MT 3/8, 8.98751 lb

There are 55 types of guide pins available and an optional locking mechanism.? C(L)KQ series? has positioning and clamping at one time!? Precision adjustment of clamping height is possible by choosing the with-shim type.?

Series IDU provides a stable supply of dry air even under high demand conditions with an inlet air temperature of 55 C. Improved corrosion resistance with the use of stainless steel, plate type heat exchanger , Protects penumatic equipment from moisture , Rated inlet air temperature: 55 C , Refrigerant R134a(HFC), DRYER, OTHERS, IDU DRYER/AFTERCOOLER, IDU OTHER SIZE(MISC.