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Conditions DC inverter Inverter fan pump Low High Motor rotation rate (For air-cooled type) Inverter pump Power reducing effect of the inverter pump Inverter pump Current model HRSH090 35 L/min 55 L/min Inverter Power consumption (Pump only) Power consumption (Pump only) pump 0.6 kW 1.1 kW Tank Tank 55 L/min 35 L/min 35 L/min 0.3 MPa 35 L/min 0.3 MPa Users equipment Users equipment The motor

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55

Slider Type Ball Screw Drive/11-LEFS Series

Measuring Conditions Description Laser dust monitor (Automatic particle counter by lightscattering method) Measuring instrument Minimum measurable particle diameter 0.1 m Suction flow rate 28.3 L/min (ANR) Sampling time 5 min Setting conditions Interval time 55 min Sampling air flow 141.5 L (ANR) Clean bench (ISO Class 5 equivalent) Vacuum suction from vacuum port Laser dust monitor Particle

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

supply voltage [V] 100 to 120 VAC (50/60 Hz), 200 to 230 VAC (50/60 Hz) Reference page Page 607 533 11-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55

Series 11-MXJ Air Slide Table

J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A Model G GA H I J K M Z ZZ 11-MXJ8-5 11-MXJ8-10 11-MXJ8-15 11-MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 Other dimensions are the same as standard model (Series MXJ). 19 28 20 8 25 39.5 54.5 48 55 829 Air Slide Table 11-MXJ Made to Order Air

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1112 B Diaphragm Valve for Ultra High Purity Manually operated type Series AZ3652 & 4652 inch (mm) Dimensions AZ3652 & 4652 Ports: 2PW (Welded) Ports: 2P (Machined) 1.5 (38) 1.5 (38) BAR STOCK BODY Note) FORGED BODY 0.44 (11.2) 2.17 (55) 2.17 (55) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A A Connections: TW Connections: TW 1.0 (25.4)

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

from to respectively. 2020 PVQ Specifications VEF VEP Rated pressure range Display/Set pressure range Withstand pressure Display/Minimum setting unit Applicable fluid Power supply voltage Current consumption Switch output 0 to 1 MPa 0.1 to 1 MPa 1.5 MPa 0.01 MPa (Air, Non-corrosive gas, Non-flammable gas) 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) 55

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55

Series IDU provides a stable supply of dry air even under high demand conditions with an inlet air temperature of 55 C. Improved corrosion resistance with the use of stainless steel, plate type heat exchanger , Protects penumatic equipment from moisture , Rated inlet air temperature: 55 C , Refrigerant R134a(HFC), AIR DRYER, OTHERS, IDU DRYER/AFTERCOOLER, IDU OTHER SIZE(MISC.

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, VQ5000, VALVE, VV5Q51/55 MANIFOLD, RM, VV5Q51/55 BASE MT 1/2, 9.47987 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, VQ5000, VALVE, VV5Q51/55 MANIFOLD, RM, VV5Q51/55 BASE MT 1/2, 14.33004 lb

5 to 55 20312560.7252525?

Add to Cart SMC SJ3000-155-1A blocking disk label, SJ2000/SJ3000/SZ3000*** $13.64 + Add to Quote Add To Cart Add to Cart SMC SV2000-55

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, VQ5000, VALVE, VV5Q51/55 MANIFOLD, RM, VV5Q51/55 BASE MT 1/2, 20.38178 lb

5 to 55 15111100110.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.43(0.51)

5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66(0.76)

5 to 55 20312560.7252525?

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, DEVICE NET, VALVE, VV5Q51/55 MANIFOLD, QP, VV5Q51/55 BASE MT 3/8, 7.71617 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, PLUG-IN, VQ5000, VALVE, VV5Q51/55 MANIFOLD, QM, VV5Q51/55 BASE MT 3/8, 8.98751 lb