Clean Regulator/Fluororesin Type

(MPa) 0.15 0.15 0.15 SRF SRF ITV 0.10 0.10 0.10 IC 0.05 0.05 0.05 ITVH 0.00 0.00 0.00 0 1 2 3 4 5 Flow rate (L/min (ANR)) 0 5 10 15 20 Flow rate (L/min (ANR)) 0 10 20 30 40 50 Flow rate (L/min (ANR)) ITVX PVQ VY1 Input/Output Characteristics (Representative Value) Inlet pressure: 0.5 MPa Flow rate: 0 L/min (ANR) Fluid: Air VBA VBAT SRF10 SRF30 SRF50 AP100 0.5 0.5 0.5 0.4 0.4 0.4 Outlet pressure

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

type (Except for 6) Single clevis type (Non-integrated type) Double clevis type 10 15, 30, 45, 60, 75, 100 16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

LEKF-OMZ0035

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

When using a differential pressure indication switch and if a filter clogged signal is incorporated into the sequence circuit of the machine, make sure to design the system so the filter clogged signal does not operate until normal operation starts. 06/08 10/12 0.03 0.02 03/04 Reset button 0.01 View port 10 30 50 100 300 500 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured

EXxx-OMY0006CN

L/A LED Table 10-22 L/A LED L/A 1/2 SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2 SI 1/2XF1/2 * *: Link LED Act LED 10.9.1.5. FO1/2 LED Table 10-23 FO 1/2 LED FO 1/2 2dB 0dB 2dB 0dB 10.9.2. LED 2 LED UT1 UT2 UT1 UT2 IN0, IN1, , IN7 M IO (Zone M) / Z1,Z2,Z3 (Zone 1-3) / Fig. 10-4 EX245-FPS1/2/3 LED 2 10.9.2.1.

T

24 1 3 to 90 L x 5.3 + 200 TCU1208-1-N-X6 TCU0604-2-N-X6 1 3 to 35 N x 12 67 L x 5 + 200 6 4 N x 12 2 3 to 66 37 L x 3.8 + 200 12 8 TCU1208-2-N-X6 TCU0604-3-N-X6 2 3 to 30 67 N x 24 L x 3 + 200 37 N x 18 3 3 to 44 L x 2.5 + 200 : B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) 15-6-8 1 Polyurethane Flat Tubing Series TFU Compact piping possible Model

Air-hydro Unit

Suitable for slow operation of a rotary actuator. CC CC Integrate a converter and a valve unit in a compact configuration. Possible to select 4 types of valve units for applications. Possible to connect a converter and a valve unit independently. Wide range of series in terms of converter capacity and valve unit flow rate control capability.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1001FM AS2001FM AS2051FM Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number of needle rotations 725 AS-FM Series Construction Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

For L dimension, refer to the dimensions of each kit. 12.5 (Pitch) 5.25 7.5 VQ 25 35 VKF Each manifold can be mounted on a DIN rail. Order it by indicating an option symbol for DIN rail mounting style, -D. In this case, a DIN rail which is approx. 30 mm longer than the manifold with the specified number of stations is attached. 5.5 1.25 L Dimension VQZ L = 12.5n + 10.5 35.5 1 23 No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Auto switch type Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

bracket) are included with the above parts. 3 Series VCB Direct Operated 2 Port for Heated Water Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical

VM

Inch size 1/4" 1/8" 5/32" Flow rate (l/min(ANR)) 170 100 120 150 IN OUT Effective area (mm2) 2.6 1.5 1.8 2.3 IN P1 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

PNP open collector 2 outputs Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Panel mounting Specifications for Display Unit PF2D300/301 Model 0.25 to 4.5 l/min 1.3 to 21.0 l/min 2.5 to 45 l/min Flow rate measurement range Note 1) 0.25 to 4.5 l/min 1.3 to 21.0 l/min 2.5 to 45 l/min Set flow rate range Note 1) 0.05 l/min 0.1 l/min 0.5 l/min Minimum set unit Note 1) Accumulated

0.01

wiring/Supply port right) IN Spacer Seal for additional station End plate L End plate R Y200-A ISA-7-B ISA-6-B ISA-7-A When a 2 port solenoid valve is connected to the right: ISA-6-A When 2 air catch sensors are connected or when a 2 port solenoid valve is connected to the left: Bracket ISA-4-A Straight, 5 m A pair consists 1 set.

Soft Start-up Valve

size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/

Air Cylinder

For example, the bore size to move a workpiece with a weight of 37 kg requires a bore size of 43 or more.

SYJ300-OMU0003

( ) , 8 No.SYJ300-OMU0003 SYJ Series AC200V,AC220V L,MAC DC AC200V,AC220V ,, [] [] SYJ3000,5000,7000 3 SYJ300050007000SYJ300500700 3 SYJ300-P.17 SYJ500-P.19 SYJ700-P.21 D 0.1Nm [E ] (D,E) 9 No.SYJ300-OMU0003 SYJ Series 300mm Assy DCSY100-30-4AAC100VSY100-30-1AAC200VSY100-30-2AACSY100-30-3ADC SY100-30-A 2 300mm 6 600mm 10 1000mm 3.23.7mm 15 1500mm () 20 2000mm 25 2500mm