Piping Specifications: R1/8 Piping Adapter, Side Ported, Output Specifications: NPN Open Collector 2 Outputs, Unit Specifications: Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan, Lead Wire: -, Adapter: -, Calibration Certification: -

Piping Specifications: NPT1/8 Piping Adapter, Side Ported, Output Specifications: NPN Open Collector 2 Outputs, Unit Specifications: Fixed SI Unit, kPa, Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: None, Calibration Certification: w/Certificate

Piping Specifications: M5 Female Thread/Rear Piping Port, Output Specifications: NPN Open Collector 2 Outputs, Unit Specifications: Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan, Lead Wire: No Lead Wire, Adapter: Panel Mount Adapter+Front Protective Cover, Calibration Certification: -

Soft Start-up Valve

Flow Rate Characteristics Series AV2000-A AV3000-A AV4000-A AV5000-A Port size 1(P), 2(A) 1/4 3/8 1/2 3/4 1 3(R) 1/4 3/8 1/2 3/4 1(P) R 2(A) C[dm3/(sbar)] 9.2 13.1 19.2 34.8 41.3 b 0.36 0.27 0.32 0.66 0.34 Cv 2.4 3.1 5.1 12.6 13.7 Flow rate characteristics 2(A) R 3(R) C[dm3/(sbar)] 8.8 9.2 10.1 23.7 b 0.46 0.48 0.55 0.67 Cv 2.5 2.6 3.2 9.2 Pressure for switching from low speed air supply

Quick Exhaust Valve Series AQ 1

Description Material Note q PBT PBT Body A Body A Electroless nickel plated Electroless nickel plated Brass Brass Seat ring Seat ring w w Electroless nickel plated Electroless nickel plated Brass Brass Valve seat Valve seat e e Stainless steel 304 POM Silenser cover Elbow union body r r PVA sponge POM Silencer Spacer t t POM POM/Stainless steel Spacer Cassette y y POM/Stainless steel NBR

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

PSxx-OMT0001CN

m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

Precision Clean Regulator Series SRP

B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

Wedge Cam Operation Provides

MHW2 Groove position of auto switch A Model MHK2-12l MHK2-16l A 10.4 12.8 B 1.8 1.6 MRHQ B Auto switch Standard switch grooves Dimensions A and B other models are same as standard switch grooves. 2.4-17

Thermo-chiller

Cable size Crimped terminal on the thermo-chiller side Applicable model HRS100-A -20HRS100-W -204 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 HRS150-A -20HRS150-W -2040 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-A -40HRS100-W -403-phase 380 to 415 VAC (50/60

HRS100/150

Applicable model HRS HRS-BP008 HRS100-HRS150-HRS 090 HRS 100/150 HRS 100/150 HRSH 090 q To circulating fluid outlet To circulating fluid return port HRSH r t w y HRSE r HRZ u r HRZD t r e HRW HECR HEC Parts List HEB No. Description (The figure shows the HRS-150-A-20.)

HRL

CH1 r Circulating fluid flow rate It indicates the fluid flow rate. This value is not measured by a flow meter. It should be used as a reference value (rough indication).

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

MXF

-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 4H9 depth 4 +0.030 0 4H9 depth 4 +0.030 0 80 NN-4.2 23 12.5 NN-8 6.7 H 2-M4 x 0.7 thread depth 10 5.5 NN 2 NN-M5 x 0.8 ( 1) x H G 11.5 Section AA A Operating port 2-M5 x 0.8 M 10 0.3 19.5 (Table length) N 2 ( 1): The number of pitches 21 7 J I 3 Z Max. 9 ZZ H G 27.5 5 4H9 +0.030 0 depth 4 (mm) M J I NN H G N Z ZZ Model MXF16

ML1C

LP-01 ML1C LC-01 25 32 40 Series Mounting position A B ML1C 177.5 128.5 152.5 123.5 147.5 172.5 D-M5 D-M5W D-M5T Lead wire cap Lead wire clamp Auto switch 14 11 Lead Wire Clamp/Lead Wire Cap (Option) 22 22 B A Lead wire clamp Lead wire cap Series LC-01 LP-01 ML1C (mm) 25 32 40 Mounting position Series A B 124.8 148.8 173.8 ML1C 113.2 137.2 162.2 Minimum Stroke for Auto Switch Mounting Operating

2–4

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if a surge is applied repeatedly. When directly driving a load which generates surge, such as a relay or solenoid valve, use a type of switch with a built-in surge absorbing element. 8.

3

Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor, C-R element, etc., creating a possible danger that the valve may not turn off.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

R.