Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.
Appropriate clamping torque (Nm) 0.18 to 0.25 1.13-3 4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000 How to Order L 1 5 5 VQD11 Body Sub-plate port size 2 3 5 M5 thread Without sub-plate (Manifold) M5 thread Body ported Body ported (Single unit) Body ported (Manifold) Base mounted M5 Base mounted M5 Valve option Electrical entry Standard (2W) Vacuum (2W) Large flow (4W) Large
D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87
G MADE IN IDF100150F-W i.2 i-6 IDX-OM-Z004 i i.3 HFC IDF100150F-W i.3 i-7 IDX-OM-Z004 i i.4 / 1 1.5 () IDF100150F-W i.4 / i-8 IDX-OM-Z004 1 1 1.1 i.2.9 1 2 IDF100F-30-W C,RV IDF100F-30-CRVW4 IDF 100 F 30 W 4 C 5 G ) K 100kW 100 P 125kW 125 150kW 150 R ) V AC200V(50Hz) AC200/220V(60Hz) 30 1 4 5 C G K P R V 1.1 IDF100150F-W 1 1 IDX-OM-Z004 1 1.2 1.2.1 (C) 1.2.2 G 1.2.3
A1 L1 MM NX NDH10 R1 U1 Dd9 d L m t l 3 15.2 12.2 CD-J010 10 1.2 0.3 Type C 3.2 3.3 0.030 0.060 CM2 10 4.8 22.7 18.3 CD-Z015 16 I-J010B 10 CD-J010 1.5 0.7 Type C 5 8 21 M4 x 0.7 3 15.2 12.2 1.2 0.3 Type C 3.2 5.3 3.3 3.3 +0.048 0 0.030 0.060 0.030 0.060 3.1 8 9 CD-JA010 16 3 18.2 15.2 10 I-J016B 16 IY-J015 1.2 0.3 Type C 3.2 8 25 M5 x 0.8 4.8 16.6 12.2 1.5 0.7 Type C 5 3.3 5.3 5.3 +0.048
x 0.5 M5 x 0.8 14.6 closed (mounting screw attachment ) Finger closing port 4 15 3 Max. 7.3 7 +0.03 0 3-4H9 42 78 Depth 6 (one each on three sides) 22.5 M5 x 0.8 Finger opening port 3-R2 29 15 16 10 22 8 31 51.5 18 40 Angle adjustment bolt 6 2-5.5 through 4-M5 x 0.8 3-R2 2-9.5 depth of counter bore 3 Depth 8 (two on opposite side) 11 2 10 +0.03 0 3-4H9 long groove depth 4 M5 x 0.8 Port A
SQ Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ0 Passage/Stations Station 1 Station 5 Station 10 Station 15 Model VQ4 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv
Piping Specifications: N01 (NPT1/8 Piping Adapter, Side Ported), Output Specifications: B (PNP Open Collector 2 Outputs)
Piping Specifications: N01 (NPT1/8 Piping Adapter, Side Ported), Output Specifications: A (NPN Open Collector 2 Outputs)
Piping Specifications: M5R (M5 Female Thread/Rear Piping Port), Output Specifications: B (PNP Open Collector 2 Outputs)
Piping Specifications: 01 (R1/8 Piping Adapter, Side Ported), Output Specifications: A (NPN Open Collector 2 Outputs)
Piping Specifications: 01 (R1/8 Piping Adapter, Side Ported), Output Specifications: B (PNP Open Collector 2 Outputs)
Piping Specifications: N01 (NPT1/8 Piping Adapter, Side Ported), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage)
Piping Specifications: 01 (R1/8 Piping Adapter, Side Ported), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage)
Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: -, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: [Rc (R)] R, Plumbing Thread Nominal: [1/8] 1/8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range
Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: -, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: [Rc (R)] R, Plumbing Thread Nominal: [1/8] 1/8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range
Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: -, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range
Piping Specifications: NPT1/8 Piping Adapter, Side Ported, Output Specifications: NPN Open Collector 2 Outputs, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certification: -
Piping Specifications: M5 Female Thread/Rear Piping Port, Output Specifications: PNP Open Collector 2 Outputs, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certification: -
Piping Specifications: NPT1/8 Piping Adapter, Side Ported, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certification: -