CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

Series VQ Metal Seal/Rubber Seal Body Ported

The direction of the L and M connectors of a pilot valve is opposite to that of the single and double style. (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) X18 {A side( Bottom side)} {B side(Top side)} X18 {A side( Bottom side)} {B side(Top side)} 3 position (VQ1000 only) 3 position (VQ1000 only) Voltage 1 to 6 Voltage 1 to 6 Note 1) (H): 1.5W, (Y): 0.5W, G type: DC only Note 1) (H

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Manual override 3 position closed center (A) 4 (B) 2 Non-locking push style (Flush) : B: Locking style (Slotted) 3 5 (R1) 1 (P) 3 (R2) 3 position exhaust center (A) 4 (B) 2 4 1 (P) 3 (R2) 5 (R1) Electrical entry 3 position pressure center (A) 4 (B) 2 G: Grommet (DC spec.)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Flow Rate Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 12 (PA) 23 (AR) Valve model Flow rate characteristics Weight (g) Note) Actuation type Port size Effective area (mm2) L/M plug connector M8 connector Grommet 10-SYJ312M 10-SYJ322M 10-SYJ314M Body ported N.C. 0.41 0.36 0.18 0.31 0.086 0.089 0.35 0.36 0.33 0.31 0.086 0.089 32 M3 x 0.5 33 0.9 37 N.O.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

M1 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

KJ

Weight Color of release button Model KDM10-01 KDM10-03 KDM10-07 No. of connecting tubes 1 8 5 32 1 4 5 16 1 8 5 32 1 4 5 16 300 g 10 Red KDM10-09 520 g KDM20-01 20 KDM20-03 520 g KDM20-07 KDM20-09 950 g KDM20 Applicable Tubing Tubing material Tubing O.D.

Compressed Air Preparation Filter

) V C Q IN OUT B Maintenance space A G 23 Compressed Air Preparation Filter AMK Series Dimensions Applicable model Semi-standard Metal bowl AFF/AM/AMD AMK Modular Connection Example B B AMK20-D AMK30-D AMK40-D Model Standard specifications Optional specifications Bracket mount P A B C D E G J M N Q R S T U V AMK20-D 1/8, 1/4 40 133.9 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 AMK30-D 1/4,

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

CG5-S

Green (G) Green (G) Green (G) T0645 Color symbol -20 Black (B) Clear (C) Clear (C) 4.5 White (W) Orange (YR) Orange (YR) Black (B) Black (B) Black (B) White (W) White (W) White (W) T0806 Red (R) Red (R) Red (R) 6 8 TU0805 TU0805 Color symbol -20 Blue (BU) Blue (BU) Blue (BU) 8 8 5 5 Color symbol -100 Color symbol -20 Yellow (Y) Yellow (Y) Yellow (Y) Green (G) Green (G) Green (G) Black (B)

VEX1

VEX390 VEX342 Solenoid for subplate VEX342 Air operated for subplate VEX322 Solenoid valve Speed controller Silencer Port size Fitting (One side) 4 pcs System VEX3 2 1 2 AS4000 AN200 T1075 (10) DL10-02 A B T1209 (12) DL12-02 C AS420 AN300 T1209 (12) DL12-03 VEX3 2 3 4 D AS420 AN400 SGP elbow 90 1 2 B SGP B 1 2 E AS420 AN400 90 elbow F G AS500 AN500 AN600 SGP B 90 elbow 90 elbow 90 elbow

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

3H9 ( ) depth 2.5 +0.025 0 1 12 7 7 3.2 3.2 6.3 A B H G (NN 1) x H 10.5 5.5 10.5 5.5 A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L

ZX

Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Digital vacuum switch unit 06 ZZX1 R B 21 C 0X ZSE3 D Supply port location Stations 01 1 Unit for replacement Thread type R L Left side Right side Nil F G Rc 1 8 Piping specifications 08 8 B Both sides C Connector (0.6 m) T NPTF Pressure indication System for external vacuum (3) Adsorption confirmation switch unit Output

IR1000/2000/3000

x 1.5 NBR O-ring JIS B 2401 P3 JIS B 2401 P4 JIS B 2401 P5 NBR O-ring (1) (1) (1) P36203015 NBR Seal (A) P36203016 NBR Seal (B) KT-IRV1000 KT-IRV2000 KT-IRV3000 Repair kit no.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

X Z Y m3 x g x X x m2 x g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting m1 m2 m3 m4 Note) M3 Static load (m) M1 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment z y Y M2 m1 x g x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

IDG

HA AT (G) (B) (D) ID (H) AMG Purge air for dehumidification AFF AM Misc.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

NPT1/8 15 14 14 8 7.5 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 15 Operating port 2 x Rc, G, NPT1/8 13 3 5H9 ( ) depth 5 +0.030 0 2 x M6 x 1 thread depth 6.5 5H9 ( ) depth 5 +0.030 0 HA GA NN x M6 x 1 thread depth 12 6 B A 9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN 1) x H Section AA Section BB (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238

RLQ

Thread Nut Rod end male thread Foot style (including mounting bolt) Front flange style (including mounting bolt) Rear flange style (including mounting bolt) Double clevis style (including pin, snap ring, bolt and flat washer) With bypass piping Calculation (example) RLQD32-20M-B Basic weight: RLQA32-20. 531 g Additional weight: Magnet . 11 g Rod end male thread . 43 g Double clevis . 145

HRX-OM-W002

G4 [ ] 18AWG G/Y G G4 [ ] 4 18AWG G/Y 18AWG G/Y 4 Inverter IV L2/N W W 2 2 [ ] 3 18AWG BK 18AWG BK BK 3 W V M V [ ] 2 18AWG BK WH 8 8 2 V G 3 L1/L U U 1 1 [ ] 1 18AWG BK 18AWG BK RD 9 9 1 U PM PUMP 5 5 (CN3) 7 7 6 6 4 4 3 3 PM PUMP 2 2 PM PUMP 1 1 16AWG G/Y G4 [ ] 2/2 G V (CN1) PM 16AWG G/Y G4 [ ] G U Standard BL BL DC Power Supply Condenser DCPS [ ] 18AWG G/Y G2 5 5 C3 18AWG BK 1 1 3 3 3