Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: R1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

IDX-OM-Z004

[25] 80 30 40 (mg/L) 200 50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

Digital Gap Checker

ISA3-F ISA3-G ISA3-H Piping length: 1 m Piping length: 1 m Piping length: 1 m Piping length: 3 m Piping length: 3 m Piping length: 3 m Piping length: 5 m Piping length: 5 m Piping length: 5 m -18No.PS-OMT0002-E 2 About this product Response time Response time is the elapsed time between the pressure supply and the turning ON of the switch output.

VQ5000

0: 500mm L 1: 1500mm L 2: 3000mm U D U D U D 83.5 106 59.2 46.8 55.5 M5 ground screw Station No. 9 9 2n-1/2 (ports A, B) Electrical entry on U side (LU) 34.5 U side n 12 X ... ... ... ... ... ... ...

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 71 lb

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

0: 500mm L 1: 1500mm L 2: 3000mm U D U D U D 83.5 106 59.2 46.8 55.5 M5 ground screw Station No. 9 9 2n-1/2 (ports A, B) Electrical entry on U side (LU) 34.5 U side n 12 X ... ... ... ... ... ... ...

CA2

Lead wire length symbols: 0.5 m Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z In addition to the models in the above table, there are some other auto switches that are applicable.

Smooth Cylinder Series CQSY

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

VZS

DOZ is not available. 2 9 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length: 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector

RSH

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

ZSE3/ISE3

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type. Please refer to page 16-4-5 for figure.

HRS100/150

Cable size Crimped terminal on the rated current thermo-chiller side HRS100-Al-20-l HRS100-Wl-20-l 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 30 A M5 HRS150-Al-20-l HRS150-Wl-20-l 40 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-Al-40-l HRS100-Wl-40-l 3-phase 380 to

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

The spacing (L) of the support must be no more than the values shown in the below graph. MY2 H/HT MY3A MY3B m (800) MY3M 50 L (600) 40 m L 30 MY1H40 (550) Mass m (kg) m MY1H32 20 L L MY1H25 10 Caution 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting it.

Dedicated Controller

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 Model M 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Controller Connectors These are connectors 'all halfpitch type' used for CN1 (control input/output) and CN2 (general purpose input/output).

Thermo-chiller

Total hardness [mg/L] 200 or less Ammonium ion (NH4+) [mg/L] 0.1 or less Calcium hardness (CaCO3) [mg/L] 150 or less Residual chlorine (Cl) [mg/L] 0.3 or less Ionic state silica (SiO2) [mg/L] 50 or less Free carbon (CO2) [mg/L] 4.0 or less Iron (Fe) [mg/L] 1.0 or less Reference item In the case of [Mcm], it will be 0.003 to 0.01.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-SCREEN HIGH PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N61, 76 lb

Tamper Proof and Flat Head Screw

L4 L5 M1 d AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 5/32" 9.3 12.7 17.3 22.1 12.3 12.7 AS121F-U10/32-03T AS121F-M5-04T 28.4 4 9.3 M5 x 0.8 8 9.6 4.5 31 0.7 31 0.7 28.4 10-32UNF 8 9.6 4.5 AS121F-M5-06T AS121F-U10/32-05T 3/16" 11.4 21.3 26.1 16.5 11.6 6 18.1 11.7 13.5 22.9 18.3 23.1 11.7 AS121F-U10/32-07T AS221F-01-23ST 1/4" 12 13.5 3.2 8.4 12.7 AS221F-01-04ST AS221F-N01

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120