Digital Flow Switch ) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
MHT2 MHY2 Transferring work MHW2 MRHQ Clamping work Auto switch INDEX Applicable auto switch Page Solid state switch DF9/F9 l W type Water resistant 2 color indication D-F9BA Type P.2.8-8 to 2.8-15 Solid state switch D-Y5/Y6 type D-Y7 type Water resistant 2 color indication D-Y7BA type P.2.8-16 to 2.8-23 2.8-3 Series MHY2/MHW2 How to Select the Applicable Model How to Select Procedure Confirm
Printed in Japan. 1st printing December, 1999 D-SMC.L.A. P-80 (D)
Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W
Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (D)
Nh9 RW L LA0.1 LB PD0.05 PB0.02 E PC0.05 PA0.02 GB GA C 2 x 2 x P H7 depth D 2 x 2 x MM depth J 2 x 2 x NPT 1/4 G Rc Hexagon socket head plug RD B [mm] Bore size B C D E GA GB J L LA LB MM N P Rubber cover Metal cover 50 92 48 12 13.7 95 166 12 376.6 155.5 78.4 78.4 M8 x 1.25 19 8 63 110 54 15 16.6 99 171.5 12 391.6 161 78 78.4 M10 x 1.5 22 10 Bore size PA PB PC PD R RA RB RC RD RR W XB XC
R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.
Applicable Auto Switch Style Auto Switch Model Page Electrical entry (Function) Bore size D-A7, A8 D-A7lH, A80H D-A73C, A80C D-A79W D-A9l D-A9lV D-F7l, J79 D-F7lV D-J79C D-F7lW, J79W D-F7lWV D-F7BAL D-F7lF D-F7NTL D-F9l D-F9lV D-F9lW D-F9lWV D-F9BAL D-F5DWL 5.3-14 Grommet (Perpendicular) 5.3-15 Grommet (In-line) 20 to 63 Reed switch Solid state switch 5.3-16 Connector Grommet (2 color indication
L A93L Note) Refer to P. 177 to 179 for further information of auto switch. PLC: Programmable Logic Controller Specifications Specifications are same as the standard type.
= 56 60 (73) R 4.5 Manual override 18 13 13 B A B 14 12 P = 56 A PA B 18 A B 14 12 A PA B L1 L2 A B L1 L2 14 12 A PA B A B 14 SMC A PA B A B A PA 40 (53) L-side R-side L-side R-side (2n-1/8) D-side D-side 14 34 103 2 103 174.5 (Single) 4n-3/8, 1/2 2, 4 port 94 62 59 17 174.5 (Single) 216.5 (Double) 216.5 (Double) 221.5 216.5 (3 position) 221.5 216.5 (3 position) Bottom ported M12 connector
0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5, D-J5 D-F5W, D-J59W D-F5BAL, D-F5NTL D-F59F D-A3, D-K39 D-G39 D-A44 D-Z7, D-Z80 D-Y59, Y7P D-Y7W D-A5 D-A6 D-A59W D-Y69, D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Bore size (mm) CP95 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht NCM
Load voltage Auto switch model Lead wire length (m)* Indicator Wiring (Output) Electrical entry Applicable load Direction of switch mounting screw In-line C76 C73 B53 B54 B64 C80 C73C C80C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA G5NT H7NF Style Special function 0.5 () (L) (Z) (N) None 3 5 AC DC Perp. B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.
Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (
Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) D C d Dd9 H1 B1 t m t l m L Part no.
Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) D C d Dd9 H1 B1 t m t l m L Part no.
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.
Dimensions 15 D HL XA FH 4-SS thread depth S (Helical insert depth) Attached from bottom with CAP bolt Bolt size: MD Attached from top with bolt L 4-recessed area diameter BB 4-recessed area depth CC LA A X A FG 4-BA LF Body Switch rail FG X A FH XA HL HB Note 1) Note 1) FF D Floating block FE Note 1) Section D-D 20, 25, 32, 40 D Attached from top with CAP bolt Floating block L LA A LF Attached
A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5