Membrane Air Dryer

(64) O S O S (Maintenance space 100 mm or more) Port size: Rc1/8, 1/4 (NPT, G threads are not available.) 53 Purge air discharge tubing port for dehumidification Applicable tubing O.D.: 8 Drain Drain M5 x 0.8 M5 x 0.8 23 Membrane Air Dryer/Unit Type Series IDGM) IDG10M3, 20M3 IDG10HM3, 20HM3 Single Unit Type Model Selection Made to Order

VEX1

M5 plug M-5P The cushion incorporated in the cylinder has a limit to the relationship between maximum working speed and load. Please check it with the cylinder catalog.

VZA2000

VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141-2-01 VZA2241-1-01 VZA2241-2-01 VZA2341-1-01 VZA2341-2-01 VZA2441-1-01 VZA2441-2-01 Single Double Closed center Exhaust center 0.60 0.60 0.56 0.60 0.43 0.43 0.15 0.20 0.15 0.15 0.13 0.15 0.59 0.59 0.59 0.59 0.30 0.30 0.22 0.22 0.15 0.15 0.14 0.14 Body ported Base mounted (With sub-plate) 2 position Body side M5 x 0.8 3 position M5 x 0.8

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

For details about auto switches with pre-wire connector, refer to page 7-9-36. 7-6-2 3 Series CQ2 Compact Cylinder: Standard Type Double Acting, Single Rod Type 12 40 20 50 16 25 63 32 80 100 Bore size (mm) Through-hole (Standard) Mounting Both ends tapped style Built-in magnet Pneumatic Air-hydro (1) M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Screw-in

New

type (4 cores) Cable connector 3 m (33) 52 12.5 Setting part 12 M12 x 1 Cable connection thread (Plug type) 4 10.5 11 108 Digital pressure display M5 x 0.8 Solenoid valve EXH M4 x 0.7 depth 8 F.G.

Precision Cylinder Series MTS

section 6 4.5 2-M5 x 0.8 (port size) 5.5H7 +0.012 0 10h7 0 0.015 16 0.2 4-M5 x 0.8, effective length 8 24 0.2 4-4.5 through 2 x 4-7.5, counter bore depth 4.5 (opposite side also) 14 15 4 28 0.2 28 0.2 38 36 26 53.5 102.5 + Stroke 18 25 M5 x 0.8 120.5 + Stroke 16 0.2 22 24 0.2 4-M5 x 0.8, effective length 8 Rod end male threads 10h7 0 0.015 Width across flats 8 M6 x 1 M6 x 1.0 9.8 11.5 10

EX500

or 49 m/s2 in each X, Y, Z direction for 2 hrs (De-energized) Vibration resistance 98 m/s2 in each X, Y, Z direction, 3 times (De-energized) Impact resistance Standard CE marking, UL (CSA) Mass 120 g Note) The rated load current varies due to the output capability of the SI unit when connected to EX500.

PA3000/5000/PAX1000

0.7 Female mounting threads Thread depth 6 Silencer (AN120-M5) Option (PB1011 built-in solenoid valve type only) AIR SUP (pilot air supply port) Rc 1/8 FLUID IN Rc 1/8 9 11 22 13 SUP IN 11 18.5 32 EXH Foot bracket Option 45 AIR EXH (pilot air exhaust port) 2-M4 x 0.7 Female mounting threads Thread depth 6 M5 x 0.8 Thread depth 10 The PB1013 air operated type has a plug. 20 Related Products

3 Port Air Operated Valve Series SYJA300 1

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

Plug-in Unit

Part no. 1.5 m AXT100-MC26-015 AXT100-DS25-015 3 m 3 m AXT100-MC26-030 AXT100-DS25-030 5 m 5 m AXT100-MC26-050 AXT100-DS25-050 When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 " 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.

ZSE1/ISE1

NPTF 1/8 Connector type (Lead wire: 0.6 m) T1 C Connector type (Lead wire: 3 m) CL Note) Single mounting style: M5 x 0.8 (female) threaded.

Smooth Vent Valve

mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port MADE IN JAPAN (32) M S 52 (Body dimension) 65.8 (XVD2-

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

ZSP1

10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11 10 2-3.3 Mounting hole 16-7-4

Support Guide/11-LEFG Series

Workpiece fixed Model Screw size Max. tightening torque [Nm] L (Max. screw-in depth) [mm] LEFl16 M4 x 0.7 1.5 6 LEFl25 M5 x 0.8 3.0 8 LEFl32 M6 x 1 5.2 9 LEFS40 M8 x 1.25 12.5 13 L To prevent the workpiece retaining screws from touching the body, use screws that are 0.5 mm or shorter than the maximum screw-in depth.

PEEK

4 q 7 Series LVM10/100 Compact Direct Operated 2/3 Port Solenoid Valve for Chemicals Dimensions: Body Ported LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 52.5 300 UL1007 AWG22 M5 x 0.8 IN port M5 x 0.8 OUT port 5 5 2 0.8 16 13 LVM10R1-(N.C.) LVM10R2-(N.O.) LVM102R-(Universal) 1.8 (8.25) (Lead wire length) N.O.