A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?

VFR2000-OMM0001

B VFR2 1.25-31.25-3S1.25Y-3N1.25Y-3S VFR2000 A-B+B+COM -COM 1)8 2)+COM -COM 3)D U D 1 -12No.VFR2000-OMM0001 01F D COM A B 1)8 2)+COM -COM 3)D U D 1 -13No.VFR2000-OMM0001 () X () (R) () (PE) -14No.VFR2000-OMM0001 NO 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7

Compact and

For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

JXCx-OMT0034CN

(LEC) 13.1 (LEC) (LEC) (LEC) () () DRIVE ON(1) OUT05 DRIVE ON(1)OFF(0) DRIVE OFF(0) OUT05 IN05 INP ON(1)BUSY OFF(0) OUT05 OFF(0) DRIVE OUT05 OFF RESET ON No.0 DRIVE OFF(0) 45 - 13.2 (LEC) PLC PLC (LEC) CC-Link (LEC) (LEC) 30ms (LEC)30ms CC-Link IO (LEC) 30ms (LEC) 1) 4 () 4 X 30ms120ms [IO ] 2) 12 () 12 X 30ms360ms [IO ] 3) 12 ( 6 ) () 12 X 30ms6 X 30ms540ms [IO ] CC-Link

Two Hand Control Valve

2 x M5 x 0.8 Thread depth 5 26 9.5 Bracket mounting dimensions 66 54 7.5 30 10.4 30 42 10.4 2 x 6.5 2 x 6.5 42 8 54 66 Back side mounting Bottom mounting 1684 VR51 Series Specific Product Precautions 1 Be sure to read this before handling the products.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)