NCQ8

Model 025 (1/4") 037 (3/8") 050 (1/2") 062 (5/8") 075 (3/4") 087 (7/8") 100 (1") 125 (1 1/4") 150 (1 1/2") 175 (1 3/4") 200 (2") 012 (1/8") 2.35 3.75 7.11 11.5 16.5 25.7 NCDQ8Z056-T NCDQ8Z075-T NCDQ8Z106-T NCDQ8Z150-T NCDQ8Z200-T NCDQ8Z250-T 4.84 5.44 13.9 21.8 26.9 36.3 4.55 6.40 13.2 20.7 25.3 34.6 4.27 5.98 12.4 19.6 23.7 33.0 3.99 5.56 11.7 18.5 22.1 31.4 3.06 4.79 8.96 14.2 20.5 29.8

CG1

Cushion N Rubber bumper Single acting/Spring return Single acting/Spring extend S T Cylinder stroke (mm) Bore size 20mm 25mm 32mm 40mm Refer to p.1.7-21 for Standard Stroke Table. 20 25 32 40 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Cylinder with Lock

Lock unit Rod 3 C O N T E N T S MWB MWBW MWB-UT Model Selection Double Acting, Single Rod Double Acting, Double Rod Lock Unit Made to Order Auto Switch Cylinder with Lock MWB Series Model Selection p. 5 MWB Series/Single Rod How to Order p. 7 Specifications p. 8 Working Principle p. 10 Construction p. 11 Dimensions p. 12 MWBW Series/Double Rod How to Order p. 17 Specifications p.

CNS

2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L1 = 5. Q2 = M 6.

90

Note 16) Select C, L, L1, Y when the pressure sensor (P, T) is selected for t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications. Since only grommet type is available for the pressure sensor, sensor without lead wire cannot be selected.

VEX1

Refer to p.5.3-1 for details. 5.1-36

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

CLS

9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !3 CL u !4 !6 CL1 !7 !5 MLGC CNG e ^0 ^2 !

Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Symbol Output specifications Part no.

VQ5000

Note 1) Note 2) Note 3) 2-6-15 Base Mounted 16 Series VQ5000 Kit (Terminal block box kit) T 83 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 12 21 47.5 36 PE R1 5 R2 3 P 1 SMC 6-Rc 3/4 (P), 5(R1), 3(R2) port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-G3/4 Conduit port

Cylinder with Lock Series CNS

across flats KA BP (Rc, NPT, G) Unlocking port 2 x P (Rc, NPT, G) Cylinder port GL GR G G MM Q D EA E BF FY C V FT VA AL A K F BN N N M C B FX FZ H S + Stroke ZZ + Stroke With rod boot 75 40 l h + l ZZ1 + l + Stroke Long stroke Rc BQ plug with breathing hole BC element M GA T 4 x J Width across flats KA 2 x P (Rc, NPT, G) Cylinder port G G BP (Rc, NPT, G) Unlocking port GL GR GB 4 x FD FA

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Operation principles Spool valve w is pushed upward by the return spring e, port P is closed, and port A and port R are opened. When an electric current is applied to the molded coil r, the armature t is attracted to the core y, and through the push rod u, it pushes down the spool valve w. Then, port P and port A are connected.

30

5 P. 12 Metric Inch P. 6 P. 13 Metric R thread G thread P. 3 P. 16 P. 10 Inch Hexagon Socket Head Male Connector KQB2S Union Tee KQB2T Bulkhead Connector KQB2E Metric Inch P. 5 P. 12 Metric R thread G thread Metric Rc thread G thread P. 7 P. 18 P. 3 P. 16 P. 13 P. 10 Inch Inch Straight Union KQB2H Union Y KQB2U Extended Male Elbow KQB2W Metric Inch P. 3 P. 10 Metric Inch P. 5 P. 12 Metric

Refrigerated Thermo-chiller

Regarding the water quality standards for cooling water, refer to Temperature Control Equipment Precautions. 102 Technical Data C O N T E N T S M Magnet pump P. 195 Mechanical seal pump P. 194 N Non-return valve P. 195 NRTL (National Recognized Test Laboratories) P. 199 O Offset function P. 197 ON/OFF temperature control P. 197 Overload relay P. 198 P Particle filter P. 195 Peltier element

High Vacuum Angle Valve

Bellows seal Dust free, P.3 cleaned Single acting (N.C.) XLAV-2 New New Bellows seal Dust free, Solenoid valve P.4 cleaned (With solenoid valve) XLC-2 Double acting Bellows seal Dust free, P.7 Air operated cleaned High-speed operation XLF-2 Single acting (N.C.) O-ring seal P.10 High operating cycles Solenoid valve High-speed operation Single acting (N.C.)

IDX-OM-W029

TB FM1 GFCI EDV P TDR FM2 PE V IDU Series 11-6 11 3 IDX-OM-W029 11 T IDU22E/37E-30-T IDU55E-30-T GFCI R GFCI For Option R GFCI R 1 2 3 TB TB MC1 TDR MC1 TDR PRR PRR MC1THR THS PRR MC1 CM MC2 MC1 FM1 MC1 CM FM2 TDR M MC1 THP2 THP1 THS MC1 MC2 MC2 PRS1 P FM2 TDR PRS2 THR PRR P TDR MC1 FM1 MC2 PRS M P IDU75E-30-T GFCI R GFCI For Option R CM FM1 () 1 2 3 TB FM2 MC1 TDR MC1 MC2