AC Servo Motor Driver (CC-Link Type)

motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W) Connect the motor ground terminal to the driver ground terminal.

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

ZSE F/ISE

Panel mount E Lead wire length 3 m L Panel mount + Front protection cover F Analog Output Suitable model: ZSE50F/ISE50--22/62(L)-(M) Series ISE50 Series ZSE50F Analog output value (V) Analog output value (V) Unit specification 5 5 Note 1) Nil M With unit switching function Note 2) Fixed SI unit 1 1 Note 1) Under the New Measurement Law, which has been in effect since October, 1999, sales

EXxx-OMN0035CN

1325 24 V 1~814~21 DC24 V DC24 V 1325 24 V 1~814~21 FE FE -37No.EX-OMN0035CN-A OFF ON SI (3)EX600-DYF EX600-DYPF EX600-DYNF 1 0 V() 24 V() 2 0 0 3 0 V() 24 V() 4 1 1 0 V() 24 V() 2 2 1 3 0 V() 24 V() 4 3 1 0 V() 24 V() 2 4 2 3 0 V() 24 V() 4 5 1 0 V() 24 V() 2 6 3 3 0 V() 24 V() 4 7 1 0 V() 24 V() 2 8 4 3 0 V() 24 V() 4 9 1 0 V() 24 V() 2 10 5 3 0 V() 24 V() 4 11 1 0 V() 24 V() 2

CRBB-OM00004

, S9P(V), 97/93A, 90/90A No.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Input voltage 1 V 5 V The sensor input range can be set to the required value and displayed. (Voltage input: 1 to 5 V) Pressure switch/Flow switch can be displayed. M For Flow Sensor / PFMV5 Setting of the display for analog voltage A is displayed for 1 V. B is displayed for 5 V. The range can be set as required.

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

VXR21/22/23

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

3

For the analog output type, when ON the output will be 5 V or 20 mA, and when OFF, it will be 1 V or 4 mA.

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

HRX-OM-Q026

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Multistage Ejector Series ZL

length 0.5 (2.9)m For EE (ZSE4E) Lead wire length 0.5 (2.9)m NPN output Analog output PNP output Rc1/2 G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

PSxx-OMV0008CN

NPN PNP 2 OFF 80 mA 30 V(NPN ) () 1.5 V (80 mA ) 1 2.0ms (060 s/0.01 ) 2 0 3 MPakPakgf/cm 2barpsi LCD 3 (X2) / 4 (7 ) 4 (1 11 7 ) ON OUT1OUT2 4 030 s/0.01 -86No.PS-OMV0008CN-E ISE70G ISE75G ISE76G ISE77G ISE78G IP67 AC500 V 1 50 M(DC500 V ) -570() -550-1060() 3585RH() CE UL/CSA(E216656)CE EMC RoHS EMC RoHS IO-Link IO-Link V1.1 COM2(38.4 kbps) 5 IODD 2.3 ms

4-channel Flow Monitor ( compatible)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.

Clean Air Module

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

ZSE30/ISE30

Nil M With unit switching function Fixed SI unit (International System of Units) Note) Note Option Part no. Note) Fixed unit: For vacuum/Low pressure: kPA For positive pressure: MPa Lead wire with connector Lead wire length: 2 m With mounting screws (M3 x 5L: 2 pcs.) With M3 x 8L (2 pcs.)

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

MXH

Solid state switches marked with are produced upon receipt of order. 3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Since there are other

HRX-OM-X037

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil M With unit switching function Fixed SI unit Note) Nil A B None Panel mounting Front protective cover + Panel mounting Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Connectable remote type sensor part is PF2D5--1 (with analog output 1 to 5 V).