Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Auto Switches: Without auto switch, Lead Wire Length

Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: Presence, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.05 to 0.97, Port thread type: Rc, Auto Switches

76

Signal cable outlet (Electric wire diameter 0.67 (17) or less) Grommet with membrane Power cable holder (Electric wire diameter 0.71 (18) to 0.91 (23) Drain tube for drain pan of condensed water Ventilation air inlet (with dustproof filter) Top view 4 x 0.79 (20) 27.6 (700) 0.039 (1) 4.21 (107) 28.0 (712) 0.079 (2) 13.2 (335) 0.79 (20) Air inlet R2 18.1 (460) 10.5 (267) Air inlet R2 5 Refrigerated

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

Retainer prevents accidental loss of needle. 5 to 60C (No freezing) Ambient and fluid temperature Round lock nut With seal, Round lock nut, Nickel plated Option Weight (g) 181 106 64 29 10 6 3 Flow rate L/min (ANR) 105 230 460 920 1700 20 Controlled flow Free flow Sonic conductance dm 3/(sbar) 0.32 0.7 1.4 2.8 5.2 0.06 Critical pressure ratio Controlled flow 0.2 0.25 0.3 0.25 0.25 0.2 Free

VS 8-2/VS 8-4

4 5 2 1 Indicator light L2 97 7 L1 45 (n-1) x 19 45 88 19 2 2 13 Manual override 165 (3-position) 152 (Double dual 3-port) 133 118 (Single) 6.5 112 99 16 80 4 x M5 mounting holes Formula: L1 = 19n + 71, L2 = 19n + 175 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 6 5 4 3 2 9 242 346 90 194 1 128 232 223 327 8 204 308 10 261 365 11 280 384 12 299 403 13 318 422 14 337 441 15 356 460

Aluminum High Vacuum Angle Valve

(Compound No. 2101-80) Resistant to NH3 gas, etc. 460 b Glossary 4 6 Outgassing Molecular Flow Conductance Orifice conductance In the case of a A (cm2) hole in an ultra-thin plate, conductance C results from V, the average velocity of the gas; R, the gas constant; M, the molecular weight; and T, the absolute temperature. From the formula C=11.6A (L/sec) at an air tempearture of 20C.

High Vacuum Angle Valve

(Compound No. 2101-80) Resistant to NH3 gas, etc. 460 B Glossary 4 6 Outgassing Molecular Flow Conductance Orifice conductance In the case of a A (cm2) hole in an ultra-thin plate, conductance C results from V, the average velocity of the gas; R, the gas constant; M, the molecular weight; and T, the absolute temperature. From the formula C=11.6A (L/sec) at an air tempearture of 20C.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber EPR -B10 -B12 152 271 ZCUK ZPX50HBN-01-B 8 ZPX100HBN-01-B10 166 464 40 50 63 80 100 125 1 -B10 -B12 164 460 AMJ 2 ZPX63HBN-01-B10 ZPX125HBN-01-B10 235 648 3 -B12 -B12 225 644 AMV 6 12 AEP 22 How to Order HEP ZPX 40 HB N B01 B10 Related Equipment Pad diameter (mm) Mounting thread 40 40 50 50 B 8 M8 x 1.25 63 63 B10 M10 x 1.5 80 80 B12 M12 x 1.75

Special Specifications:

AM500 AM600 AMD100 AMD200 AMD300 AMD400 AMD500 AMD600 AMF200 AMF300 AMF400 AMF500 AMF600 100 x 100 x 253 150 x 140 x 446 200 x 170 x 526 280 x 280 x 497 63 x 63 x 191 85 x 85 x 258 120 x 120 x 236 140 x 140 x 383 180 x 170 x 465 63 x 63 x 136 80 x 82 x 170 90 x 90 x 233 140 x 140 x 380 140 x 140 x 490 140 x 140 x 590 80 x 80 x 153 90 x 90 x 216 140 x 140 x 250 140 x 140 x 360 140 x 140 x 460

Table of Contents

31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187) 172 (209) 194 (231) C(D)U20-D 176 (230) 193 (252) 210 (269) 227 (286) 244 (303) 261 (320) 295 (354) 329 (388) C(D)U25-D 262 (335) 286 (364) 310 (388) 334 (412) 358 (436) 382 (460

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 62 180 122 15 9 20 72 200 132 Standard stroke Long stroke (-XB11) 30 82 220 142 13 8.5 2-5.7 40 92 240 152 46 50 102 260 162 46 75 127 310 187 4-Rc 1/8 thread depth 6.5 (Piping port) (Opposite side: Same) 100 152 360 212 125 177 410 237 (Z) (30) 4-M5 x 0.8 thread depth 7.5 (30) 6 2-M8 x 1.25 thread depth 12 150 202 460

CXWM/CXWL

4-8 counterbore depth 4.5 2 x 2-5H7 depth 6 +0.012 0 2-RB0805-X552 Shock absorber (mm) ZZ Z SS S Q P L F Model CXWL16-25 CXWL16-50 CXWL16-75 CXWL16-100 CXWL16-125 CXWL16-150 CXWL16-175 CXWL16-200 184 148 121 27 160 52 39 34.5 234 198 146 52 210 52 64 47 284 248 171 77 260 65 89 53 334 298 196 102 310 90 114 53 384 348 221 127 360 90 139 65.5 434 398 246 152 410 90 164 78 484 448 271 177 460

CLS

With Auto Switch Without rod boot With rod boot Bore size (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 l T V W ZZ P S N f h ZZ1 S e MA MB MM ZZ1 ZZ 5 5 5 35 35 39 39 39 49 1/2 1/2 3/4 3/4 3/4 1 98 30 30 30 332 40 40 40 45 45 55 30 to 1000 75 133 355 Up to 1000 98 332 338 378 442 467 355 361 399 460

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 460, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): N/A, The number