PF3W7x-X445.eng

Function selection mode In measurement mode, press the SET button for 3 to 5 seconds to display [F ] on the main screen. Select to display the function to be change [F ].

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Display accuracy 0.5% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.1% F .S. 1 digit Accuracy Temperature characteristics 0.5% F .S.

Thermo-chiller

G1, Symbol N: NPT1) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Tank drain port CH1: Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Fluid contact material (Metal/Resin) CH1: Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, Fluororesin, PP, PBT, POM, PU, PC, PVC, EPDM, NBR CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin,

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Series CDU 10-/1121-/226, 10, 16, 20, 25 Free Mount Cylinder Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Ionizer Nozzle type IZN10 Series IZS

for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006 (mm) IZN1007 (inch) 3.5 2 x M3 x 0.5 depth 10 26 32

EXxx-OMN0037CN

No.EX-OMN0037CN-A / EX600-AXA EX600-AYA EX600-AMB SMC 3 9 10 12 12 14 15 15 16 16 LED 18 19 19 24 25 25 26 26 LED 27 28 28 32 33 33 34 34 LED 36 37 37 44 -1No.EX-OMN0037CN-A 45 46 46 46 46 46 47 -2No.EX-OMN0037CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

3-Position Rotary Table

No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 Description Body Cover Plate Seal Piston Pinion Gasket (for cover) Table Bearing retainer End cover A End cover B Cylinder tube A Cylinder tube B Tube cover A Tube cover B Sub piston R Sub piston F Adjustment bolt R Adjustment bolt F Magnet Wear ring Bearing Material Aluminum alloy Aluminum alloy Aluminum alloy NBR Stainless steel

Clean Exhaust Filter

(Initial conditions) 200 0.05 32 SFE1 SFE3 Inlet pressure/Back pressure [MPa] 150 SFE5 0.04 25 100 SFE4 SFE7 95 20 0.03 50 10 0 0.02 0 100 200 300 400 500 600 700 800 Cylinder driving speed [mm/s] AN 0.01 AMC Example) Bore size: 32, Driving speed: 400 mm/s, Supply pressure: 0.5 MPaG 1. From the graph, exhaust flow rate is found to be 95 L/min (ANR). 2.

TUH Series

Burst Pressure Characteristic Curve and Operating Pressure How to Order TUH0644 B 20 5 4 Bundle length Burst pressure MPa Tubing model Length 20m bundle 100m bundle Symbol 20 100 3 2 Color Maximum operating pressure 1 Symbol B W BU N Color Black White Blue Translucent 0 -20 0 20 40 60 Operating temperature C F = (1.8 x C) + 32 1MPa = 145 psi 2 High Pressure Type Series TUH Hard Polyurethane

Hard Polyurethane Tubing, TUH Series

Burst Pressure Characteristic Curve and Operating Pressure 7 How to Order 6 TUH0604 B 20 5 Burst pressure MPa Bundle length 4 Tubing Model Length 20m bundle 100m bundle Symbol 20 100 3 2 Color Color Black White Blue Translucent Maximum operating pressure Symbol B W BU N 1 0 -20 0 20 Operating temperature C 40 60 F = (1.8 x C) + 32 1MPa = 145 psi 3

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

AC Servo Motor Driver (SSCNET Type)

D 3 Set the test operation select switch to the Up Position, when performing the test operation mode by using set up software (MR ConfiguratorTM) E 2 F 1 0 (Note) This table indicates the status when the switch is set to "Down".

IDX-OM-W093

Series 6-2 IDX-OM-W093 O O O () O O 8mm5m S )DUPONT KRYTOX GPL207 IDF60/70/80/90 Series 6-3 IDX-OM-W093 6.2 2-1 6.1 OFF OFF ON OFF ON T ON IDF60/70/80/90 Series 6-4 IDX-OM-W093 7 7.1 IDF60 IDF70 IDF80 IDF90 5 65 0.15 1.08 MPa () 24585% 1 50Hz 5.3 7.5 10.9 13.5 (ANR)2 60Hz 6.1 8.6 12.8 15.5 m3/min 50Hz 5.6 8.0 11.6 14.3 3 60Hz 6.5 9.1 13.6 16.4 10 0.7 MPa 35 40 32

IDX-OM-Y002

inlet condition Note 2) 50Hz 34 46 60Hz 40 53 Inlet air pressure MPa 0.7 Inlet air temperature oC 40 Cooling water pressure MPa 0.2~0.98 Rated value Cooling water temperature oC 32 Cooling water flow rate L/min 80 90 Pressure drop at cooling water MPa 0.05 0.05 Cooling tower performance Note9) kW(RT) 28.5 (6.3) Note 4) Fluid Compressed air Operating range Inlet air temperature oC 5 to 50

AS***F 10/32 STANDARD (NPT). AIRLINE EQUIPMENT. AS***F 10/32 STANDARD (NPT). BD.

AS***F 10/32 STANDARD (PT). AIRLINE EQUIPMENT. AS***F 10/32 STANDARD (PT). BB.

AS***F 10/32 (MISC./OTHER). AIRLINE EQUIPMENT. AS***F 10/32 (MISC./OTHER). 0.01763 lb. BX.

AS***F 10/32 (MISC./OTHER). AIRLINE EQUIPMENT. AS***F 10/32 (MISC./OTHER). 0.01266 lb. BX.