Process Pump

Foot (Option) FLUID IN Rc, NPT, G 3/8" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) 63 74 Tube extension: PAF3410P13 P13N P13F 139 152 2 x M5 x 0.8 Thread depth 9 Reset button 139 114 95 19 4 x 7 mounting hole (Option is selected) Bottom view of body Air operated reset port Rc, NPT, G 1/8" 16 (9.50) (12.7) FLUID OUT 1/2" tube extension AIR SUP Rc, NPT, G1/4" (102) 119 106 14 13 97

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS22l1FSl-U01-01 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-U01-03 5/32" 8.2 AS22l1FSl-U01-07 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-U01-09 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U02-01 1/8" 1/8 13 (12.7) 7.2

CXS

14 Series CXS Model Selection Caution Confirmation of theoretical output is required separately.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

1/8 (Rc, NPT, NPTF) 1/8 (Rc, NPT, NPTF) Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 M18 x 1.5 M18 x 1.5 Width across flats 16 Width across flats 16 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 Model A 40 ZPT40HJ25-01-A18 D 118.5 40 ZPT40HJ50-01-A18 42 98 153.5 B 42 C 63 Model A 63 ZPT63HJ25-01-A18 F 121.5 63 ZPT63HJ50-01-A18 65 14.5 156.5

CRQ2

34 69 (11) 68 14 39 14.5 16.5 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 16 16 5.2 49 78 (13) 76 16 47 18.5 55 40.4 Size K Q S W Keyway dimensions TF (H9) TG (H9) TL Rotating angle JJ US TA TD UW G L TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 20 11.5 4 1 13.5 27 4 4 2.5 15 59 24.5 74 8 11 9.6 M5 x 0.8 depth 6 0 0.03 30 4 33 4 20 13.5 2 19 36 4 4 2.5 18 83 65 27 10 13

RSH/RS1H

The lever is released to allow rotations in 90 increments. 20 32, 50, 63, 80 Guide rod Set screw (M3) 10-9-14 14 Series RSH/RS1H/RSA Specific Product Precautions 2 Be sure to read before handling. Selection (RSA) Selection (RSH, RS1H) Caution 1. Do not allow pallets to strike the lever when it is standing up.

MVGQ

Note 2) For the electrical entry except the grommet type, refer to page 10-16-14.

CXS

14 Series CXS Model Selection Caution Confirmation of theoretical output is required separately.

MXF

For details, refer to page 8-30-31. 8-6-14

25

(A cord is attached to the AC adapter.) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 O.D. mm 06 08 10 6 8 10 : With piping on one side : With piping on both sides Made to Order Specifications Contents Symbol Non-standard bar length Symbol for producible bar length: 460 + 60 x n (n: Integer from 1 to 34) (For 2, 3, 6, 11, 14, 19, 24, 31 and 34 for n, use a standard model.)

Air Cylinder

Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28 3/8 88 168 Rod end nut (Standard) 30 d D C H B [mm

48

Workpiece 14 JMGP Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

energy saving effect

When deionized water is used, the electric conductivity should be 1 mS/cm or higher (Electric resistivity: 1 Mcm or lower). 30 min 20 min 14 min 10 min 6 min 4 min Facility Water Supply 2 min 1 min Warning Operating time 30 s 20 s Max. 1. The water-cooled refrigeration type thermo-chiller radiates heat to the facility water.

53

No anchor bolt is included. 139 A HRSH090 Series Inverter Type * If the product is used at altitude of 1000 m or higher, refer to Operating Environment/ Storage Environment (page 151) Item 14 * For altitude of 1000 m or higher.

Series AK1000

Please contact SMC. 3) 14 to 194F (10 to 90C) for Vespel seat. Optional ambient and operating temperature range available. Please contact SMC. 4) Mass, including individual boxed weight, may vary depending on connections or options. Hastelloy is a registered trademark of Haynes International.

Speed Controller with

17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33 14 4.3 8 25 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

EXxx-OMW0014CN

No.EX-OMW0014CN-A PROFINET SI / / EX245-SPN1A/2A/3A(SI ) EX245-DX1() EX245-DY1() EX245-LA1/LB1(IO-Link ) EX245-EA2-() 1. 11 1.1. 11 1.2. 12 2. 13 3. 14 3.1. 14 3.2. 16 4. 22 4.1. 22 4.2. 26 5. 30 5.1. 30 5.2. 34 6.SI 35 6.1. 35 6.2. 37 6.3. 39 6.4.LED 40 6.5. 43 7.EX245-DX1 46 7.1. 46 7.2. 47 7.3. 48 7.4. 48 7.5 LED 49 7.6. 50 8.EX245-DY1 51 8.1. 51 8.2. 52 8.3. 53 8.4. 53 8.5.LED

Fieldbus system Ethernet POWERLINK compatible SI unit

P tight screw (4 x 14) , 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc. P tight screw (4 x 14) , 2 pcs. (3) Intermediate support bracket EX600-ZMB1for direct mounting Enclosed parts: Round head screw (M4 x 5) , 2 pcs.

MX-OMP0051

2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20 14 14 21 21 27 46 46 MXQ20(

rep-modular-e

Tightening torque: AW10 AW20(K) AW30(K) AW40(K) AW60(K) 21 3 to 4 Nm 12 7 to 9 Nm 14 12 to 14 Nm 7. Pressure Gauge Adapter, Plug Assembly Process Procedure Tools Check item Applicable model Actuators Modular F.R.L. Pressure Control Equipment Disassembly Hexagon wrench key Nominal: AW20(K) AW30(K) AW40(K) AW60(K) 1) Remove the plug.