Series PF2D Digital Flow Switch For Deionized Water and Chemicals Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.
Repeatability Note 4) 2% F.S. (0 to 50C, based on 25C) Temperature characteristics For measured value display: 4-digits, 7-segment LED (Orange) For channel display: 1-digit, 7-segment LED (Red) Display method Status LEDs Illuminates when output is ON OUT1: Red Enclosure Operating temperature range Operating humidity range IP65 for the front face only, the rest is IP40.
5 to 50C 5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric power 180VA 300VA 300VA 300VA 640VA 180VA 300VA 640VA 180VA 300VA 640VA 640VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction Maximum positioning point setting Can be selected between the motor side and the side opposite the motor. 1008
Note 3) Solenoid valve: Max. 50C Note 4) Synthesized effective area with 2 position.
The compatibility is indicated for fluid temperatures specified for the respective products (50C or less). 7. Do not use liquids that will cause the wetted sealant to swell.
: based on 25C) 2% F .S. or less (0 to 50C: based on 25C) 5% F.S. or less (0 to 60C) ZSE30: 0.2 F.S. 2 digits or less ISE30: 0.2 F.S. 1 digit or less Repeatability 1% F.S. or less 0.2% F.S. 1 digit or less 0.5% F.S. 0.2% F.S. 1 digit or less Hysteresis mode: Variable Window comparator mode: Variable Hysteresis mode: Variable Window comparator mode: Variable Variable 1 to 10% Fixed 3% F.S.
For models with a solenoid valve, the temperature of the solenoid valve section should be no greater than 50C. All models 1. When controlling valve responsiveness, take note of the size and length of piping, as well as the Cv factor (flow rate characteristics) of the actuating solenoid valve.
(Refer to page 33.) 17 A Vacuum Unit ZK2mA Series Specifications General Specifications Valve Common Specifications Model4 ZK2-VAmK ZK2-VAmR ZK2-VAmJ 5 to 50C Without pressure sensor/switch With pressure sensor 0 to 50C With pressure sensor 5 to 50C Pressure switch with energy saving function Fluid Air Operating temperature range (No condensation) Type of actuation5 Supply valve: N.C.
OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating
Note 2) 5 to 50C when the digital pressure switch will be used.
5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric energy 180VA 640VA 300VA 300VA 640VA 100VA 300VA 640VA 640VA 300VA 180VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return function Maximum positioning point setting With magnet switch as adjacent switch, and encoder Z phase signal as home position signal
Fluid Air Operating pressure range Internal pilot type 0.2 to 0.5MPa (29 to 72 psi) 5 to 50C (41 to 122F) Ambient and fluid temperature Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Slotted locking type With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust
3cP) or less Detection style Karman vortex Flow rate measuring range 0.4 to 4l/min 1.8 to 20l/min Note 1) 4 to 40l/min Operating pressure range Note 2) 0 to 1MPa 0 to 0.6MPa Proof pressure Note 3) 1.5MPa 0.9MPa Operating fluid temperature 0 to 90C Linearity Note 4) 2.5%F.S. or less (at 25C water) Repeatability 1%F.S. or less (at 25C water) Temperature characteristics 5%F.S. or less (0 to 50C
vortex Detection type 2 to16l/min 0.5 to 4 (setting is 0.6 to 4) l/min 5 to 40l/min Flow rate measurement and setting range 0.1l/min 0.05l/min 0.5l/min Minimum setting unit l/min, gal (US)/min Real-time flow rate Note 1) Display units l, gal (US) Accumulated flow Operating pressure range 0 to 1MPa Withstand pressure 1.5MPa 0 to 9l Accumulated flow range Operating temperature range 0 to 50C
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
Type of valve actuation Air Fluid 0.2 to 0.5MPa Operating pressure range Internal pilot type 5 to 50C Ambient and fluid temperature 25ms or less Response time (for 0.5MPa) Note 1) 5Hz Maximum operating frequency Non-locking push type, Slotted locking type Manual operation With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust type
Ambient and fluid temperature operation is as follows: Digital pressure switches: 0 to 50C Take measures to prevent moisture from freezing in circuits when below 5C, since this may cause damage to the O-ring and lead to a malfunction. The installation of an air dryer is recommended for eliminating condensate and moisture.
less Detection style Karman vortex Flow rate measuring range 0.4 to 4 l/min 1.8 to 20 l /min Note 1) 4 to 40 l/min Operating pressure range Note 2) 0 to 1 MPa 0 to 0.6 MPa Proof pressure Note 3) 1.5 MPa 0.9 MPa Operating fluid temperature 0 to 90C Linearity Note 4) 2.5%F.S. or less (at 25C water) Repeatability 1%F.S. or less (at 25C water) Temperature characteristics 5%F.S. or less (0 to 50C
Power Valve Regulator Valve Series VEX1 Specifications Large Capacity Relief Regulator VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 Model VEX11001 02 Air operated, External pilot Operating style Fluid Air, Inert gas 1.5MPa 1.0MPa 0.05 to 0.9MPa 0.05 to 0.7MPa 0.05 to 0.9MPa 0 to 50C(Air operated: 0 to 60C) 0.03MPa 0.01MPa 0.01MPa Free Not required (Use turbine oil No.1
Specifications Max. operating pressure Min. operating pressure 0.8MPa 0.15MPa 5 to 50C 2.7mm 2 (0.15) 180CPM VVQ1000FPG02 1set VQ1000FPGC6M5D 2pcs.