MLGC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Long stroke Slide bearing Component Parts Description Black hard anodized Hard anodized Nitrided Hard anodized Description Rod cover Tube cover Cover Intermediate cover Piston rod Piston Brake piston Brake arm Brake shoe Roller Pin Snap ring No. q w e

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Series KV2 Fittings

Union 90 Elbow KV2L_ _-00 D2 D1 Applicable Tube M L Q D1 D2 M L App. Tube OD (inch) Q M Min. Flow Dia.

Profile Design ISO/VDMA Air Cylinder Series CP95

A Q value of approximately 620 Nl/min is obtained. 1500 2000 1500 2000 4.The 620 Nl/min.theoretical value is multiplied by 1.4 Q = 620 Nl/min. 1.4 Q = 870 Nl/min. 160 1000 1000 Maximum air consumption Q [Nl/min.]

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

VNC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket VX3 VXA Main port VN Main port Rc A LVC B C D E F H J K L M N P Q R S T Model VNC2-10A VNC2-15A VNC3-20A VNC4-25A 3 8 1 2 3 4 1 63 63 80 90 42 42 50 60 28 28 35 40 14 14 17.5 20 72.5 72.5 84 100 80.5 80.5 92 108 87 87 92 93 180.5 180.5 192 208

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

KC

(mm) 4 6 8 10 12 Note) Weight (g) D L Q M Model KCT04-00 KCT06-00 KCT08-00 KCT10-00 KCT12-00 Note) D: Max. diameter 10.4 12.8 15.2 18.5 20.9 28.6 32.7 39.2 45.5 49.2 5.3 6.1 7.1 7.9 8.6 18 19 21.5 24 25.5 8 15 23 39 52 3-applicable tubing Union Y: KCU Applicable tubing O.D.

3 Position Cylinder Series RZQ

GR-L-010 (10 g) D-X Individual -X 1225 Series RZQ Dimensions Basic style (Double end tapped): RZQA 3 x P (Port size: Rc, NPT, G) FA Q FB H effective thread depth C G I D E M K Z a a A + Full stroke L B + Full stroke M K J E W T RA 4 x O1 effective thread depth RB 4 x O1 Section a-a Basic style (Through-hole): RZQB 32, 40 Washer 2 x RR 2 x RH Flat washer: 2 positions (Included) b 2 x N 2 x

Compact and Lightweight

L-bracket (Brackets on both sides) L L x n pcs. + J x 2 L x n pcs. + K x 2 Long clamping screw set which is required for assembly needs to be ordered separately. Refer to page 224.

4

Disassembly 1) After loosening the screw q, then if the housing w is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull the screw q out of the housing w. 3) On the bottom part of the terminal block e, theres a cut-off part o.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

Gun Type Ionizer

and replacement of emitters 5 q Removal of nozzle w Removal of emitter q Turn counterclockwise. w Pull forward to remove. q Turn counterclockwise. w Pull forward to remove. 6 Bypass nozzle (Option) OSHA1910.242b compliant Even if the nozzle is obstructed, the main orifice pressure cannot exceed 30 psi (210 kPa). * Supply pressure: 0.5 MPa or less 180 Gun Type Ionizer IZG10 Series Application

o

r J tt r'T q;i];".0* 3:Common exhaust for main and t l pilot valve + . t i ,{:| P oonr PE oofts ([he pilot exhaust is connedeq to the main exhaust For type 31,531,32, S32 manitold. M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

r J tt r'T q;i];".0* 3:Common exhaust for main and t l pilot valve + . t i ,{:| P oonr PE oofts ([he pilot exhaust is connedeq to the main exhaust For type 31,531,32, S32 manitold. M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

r J tt r'T q;i];".0* 3:Common exhaust for main and t l pilot valve + . t i ,{:| P oonr PE oofts ([he pilot exhaust is connedeq to the main exhaust For type 31,531,32, S32 manitold. M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Large Size Vacuum Module: Series ZR

Example) ZR1--CN(-Q) . 1 pc. ZS-10-5A-50 . 1 pc.

VQZ100/200/300

Note 3) Weight without sub-plate 2.10-6 VQZ100/200/300 Body Ported Construction VQZ100 Poppet e w q Component Parts SY Material No. q Description Notes N.C. Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C.