10

F F 1 2 1 2 MHL2-10DZ MHL2-16DZ MHL2-16D Z MHL2-10D Z 60 60 25 25 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa Pressure 0.6 MPa 0.5 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 10

RQ

14 20 10 20 10 (All dimensions but A and CL are identical to those of the basic style.)

VXF

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

Low Profile Guide Type

Cylinder identification symbol Piping direction R L Centralized piping on right Centralized piping on left Bore size (mm) CY3B CY3R 10 15 25 10 15 25 Thread type Symbol Thread type M Rc NPT G Bore size (mm) 10, 15 CY1S Nil 25 TN TF CY1L CY1H CY1F CY1F CYP D-X Technical Data 1553 CY1F Series Construction #2 #3 #4 @0 #0 @4 @5 @6 q A @1 #7 #8 #9 !9 #1 $0 !6 #6 @9 r A $1 $2 $3 $4 t y w e !

MLU

Also, BBA2 is included when a auto switch alone is shipped. 9-13-10 10 Series MLU Plate Cylinder with Lock Construction !4 !7 !0 !4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

3-Position Rotary Table

10 1.2 12 76 34 8.1 10 50.4 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5 8 34.7 70 17 18.5 10 1.2 12 84 37 10.5 10.5 53.5 65h9 67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 10 39.7 80 19 21 12 1.6 15.5 100 50 12.4 12.5 60.6 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU JV Q S SC SD SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M4

VQ7-6/7-8

8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L Control equipment Symbol Nil A AP M MP F G C E Air filter with auto drain 10 stations 10 Air filter with manual drain Note) When equipped with control unit, one or two stations are used for mounting.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

High Pressure Coolant Valve

2 i 12(P1): External pilot port 10(P2) : Pilot EXH port !0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i.

AR Series Modular Type Regulator

IN OUT IN OUT r r q w w Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

Suction Guard (Produced upon receipt of order) FHG Series

130 130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 90 90 90 115 115 115 145 145 6 6 6 6 6 6 8 8 72 72 72 86 86 86 106 106 110 110 110 130 130 130 170 170 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130

MRQ

(mm) Stroke Size Y Q E Mounting screw 58.5 ( 5 stroke) /2 61 ( 10 stroke) /2 61 ( 15 stroke) /2 63.5 ( 20 stroke) /2 61 ( 25 stroke) /2 63.5 ( 30 stroke) /2 63.5 ( 40 stroke) /2 66 ( 50 stroke) /2 66 ( 65 stroke) /2 71 ( 75 stroke) /2 68.5 ( 90 stroke) /2 73.5 (100 stroke) /2 68 ( 5 stroke) /2 68 ( 10 stroke) /2 70.5 ( 15 stroke) /2 68 ( 20 stroke) /2 70.5 ( 25 stroke) /2 68 ( 30 stroke)

Power Valve: Economy Valve Series VEX5

10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A