IDX-OM-U010

DISPOSAL . 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS. 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping . 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS

Series: 3 (VQZ3000), Composite Symbol: 3 (3 Position Closed Center), Seal Type: 0 (Metal Seal), Function: K (High Pressure 0.9W - DC Only), Coil Voltage: 5 (24VDC), Lead Wire: YZ (DIN Terminal w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: w/o Sub-plate, Q: Q (CE Marked)

Series: 3 (VQZ3000), Composite Symbol: 3 (3 Position Closed Center), Seal Type: 0 (Metal Seal), Function: K (High Pressure 0.9W - DC Only), Coil Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 03 (Base Mounted w/Sub-plate Rc3/8), Q: Q (CE Marked)

IDX-OM-W095

IDFC80-23 IDFC90-23 2080 0.151.0MPa (7) (1) () 2045 oC85% (2) 20 oC 4.7m 3/min 7.8m 3/min 10.9m 3/min 15.4m 3/min 10 oC 2.8m 3/min 4.7m 3/min 6.5m 3/min 9.2m 3/min 3 oC 0.9m 3/min 1.6m 3/min 2.2m 3/min 3.1m 3/min 0.7MPa 50 oC 35 oC () 230V (50Hz) 10% (3) (4) 1.0kW 1.6kW 2.4kW 2.8kW (4) 5.5A 8.0A 13.0A 14.0A 30mA (5) 10A 15A 20A 30A R410A (HFC) GWP:2088 (6) 39010g 53010g 63010g

VXA31/32

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

IDX-OM-W094

. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W094 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6

Compressed Air Preparation Filter

Construction: AFF, AM, AMD t q IN OUT w Component Parts No. Description Material 1 Body Aluminum die-cast 2 Flange Aluminum die-cast 3 Bowl Stainless steel e r Replacement Parts No.

MGZ Series

Confirmation of allowable rotary torque 3.

LFE-OMZ0012

and M12 connector Bracket J Analogue 1 to 5V K Analogue 4 to 20mA Nil Yes 1 2 Yes Yes 3 Yes Thread type Port size Symbol Content Rated flow range Symbol Port size Nil Rc 1 2 3 N NPT 3 3/8 Yes F G 4 1/2 Yes 6 3/4 Yes 8 1 Yes -11No.LFE*-OMZ0012 Combination of options Options available Without Lead wire and M12 connector With Lead wire and M12 connector No Bracket Yes Accessories/ Part number

Miniature Guide Rod Cylinder Series MGJ

3 y u r !1 q t !2 !5 e !1 No.

ZMA

3 Vacuum switch with timer NBR ZM-CV !4 Check valve ZMA-VC-1A !

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

High Purity Fluoropolymer Needle Valve Series LVN 1

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 6 8 10 12 Inch sizes 03 05 07 11 13 1/8 3/16 1/4 3/8 1/2 Different diameter tubing order example Basic size With reducer Note) Applicable fitting: LQ2 Different diameter tubing (with plug-in reducer) can be selected within the same body class. (Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below.

0.4

or more 3 or more 1 (IN) port 509 SX10 Series Dimensions SX11-G Screw mount type 2 x 3.2 Mounting hole 40 3 34.9 Approx. 300 0.9 (Lead wire length) M3 x 0.5 Mounting screw (Included) 30.4 (4) 6 9 46 Gasket (Included) 23.9 11.8 9 2 (OUT) port 6 Lead wire 5.4 1 (IN) port Operates by supplying pressure to either side.

Series: 1 (VQZ1000), Composite Symbol: 3 (3 Position Closed Center), Seal Type: 0 (Metal Seal), Function: K (High Pressure 0.9W - DC Only), Coil Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: w/o Sub-plate, Q: Q (CE Marked)

Series: 3 (VQZ3000), Composite Symbol: 5 (3 Position Pressure Center), Seal Type: 0 (Metal Seal), Function: K (High Pressure 0.9W - DC Only), Coil Voltage: 5 (24VDC), Lead Wire: YZ (DIN Terminal w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: w/o Sub-plate, Q: Q (CE Marked)

Series: 3 (VQZ3000), Composite Symbol: 9 (3 Port N.O.), Seal Type: 0 (Metal Seal), Function: K (High Pressure 0.9W - DC Only), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 02T (Base Mounted w/Sub-plate NPTF1/4), Q: Q (CE Marked)

Series: 1 (VQZ1000), Composite Symbol: 3 (3 Position Closed Center), Seal Type: 0 (Metal Seal), Function: K (High Pressure 0.9W - DC Only), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: w/o Sub-plate, Q: Q (CE Marked)

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant