Magnet: D (Built-in Magnet), Mounting: B (Basic), Size: 15, Rotating Angle: 90 (Single/Double Vane), Vane: S (Single), Auto Switch: 90--Reed, AC/DC Volt, Horizontal, Electrical Entry_Lead Wire: L (3m)

Magnet: D (Built-in Magnet), Mounting: B (Basic), Shaft: W (Double), Size: 10, Rotating Angle: 90 (Single/Double Vane), Vane Type: D (Double), Connecting Port: Non (Side Ported), Auto Switch: 90--Reed, AC/DC Volt, Horizontal, Electrical Entry_Lead Wire: L (3m)

Magnet: D (Built-in Magnet), Mounting: B (Basic), Shaft: W (Double), Size: 15, Rotating Angle: 90 (Single/Double Vane), Vane Type: S (Single Vane), Connecting Port: Non (Side Ported), Auto Switch: 90--Reed, AC/DC Volt, Horizontal, Electrical Entry_Lead Wire: L (3m)

Magnet: D (Built-in Magnet), Mounting: B (Basic), Size: 10, Rotating Angle: 90 (Single/Double Vane), Vane: D (Double), Auto Switch: 90--Reed, AC/DC Volt, Horizontal, Electrical Entry_Lead Wire: L (3m)

Magnet: D (Built-in Magnet), Mounting: B (Basic), Shaft: W (Double), Size: 15, Rotating Angle: 90 (Single/Double Vane), Vane Type: S (Single Vane), Connecting Port: Non (Side Ported), Auto Switch: 90--Reed, AC/DC Volt, Horizontal

Series SV

A B A B COM PWR A A A A B B B B Cable with M12 connectors EX500-ACP. 15 Connection of sensors with M8, M12 connectors (auto switch, pressure switch, etc. A B A B COM PWR A A A A B B B B Cable with M12 connectors EX500-ACP. 15 Connection of sensors with M8, M12 connectors (auto switch, pressure switch, etc.

VQ5000

B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

Fluoropolymer Piping Equipment

" A A 1/4" B B 1/4" B B 3/8" The table of combination is the same as that for A side.

VQ5000

port B 2 A 4 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override B 2 A 4 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P = 41 58.5 P = 41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc 1/8 (External pilot port) With connector on D side (FD) 2-6-12

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B B B B 19 P 40 39 P 35 A A A A A 19 2 MAX.5 10 10 (Lead wire length) G : About 300 H : About 600 24.5 (Pitch) P=10.5 10.5 (Mounting holes) L2 4 L1 (Non-locking) Manual override A A 20 48.5 [55] 15 B B 5 36.1 1.5 29.5 A A (Pitch) P=10.5 17.5 2n-One-touch fitting (A, B port) 20 15 B B 5 1.5 2n-M5 0.8 (A, B port) (Pitch) P=10.5 15.7 Other dimensions are the same as the M5T.

Intrinsically Safe Valve

4/25/3 (A/BEA/EB) Valve model (P, EA, EB) 4, 2 (A, B) 1, 5, 3 4position dual 3 port Cv b C [dm3/ (sbar)] Cv b C [dm3/ (sbar)] N.C.

5 Port Solenoid Valve, Series VQC

B SOL. B (+) () () (+) 2 2 SOL. A SOL. A (+) () () (+) 3 3 Flat ribbon cable connector assemblies (optional) Station 2 Station 2 SOL. B SOL. B (+) () () (+) 4 4 SOL. A SOL. A Cable length (L) Part no. (+) () () (+) 5 5 Station 3 Station 3 SOL. B SOL. B 20P AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 26P AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 (+) () () (+) 6 6 SOL. A SOL.

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Bracket mounting size Accessory specification With pressure gauge With auto drain Model Port size B C D A K J H G F E Q T N P K L M B AC10B AC20B AC25B AC30B

Modular Type Filter Regulator Series AW

Metal bowl Metal bowl with level gauge Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Port size Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount With auto drain Model B 177 242 278 278 Z 6 7 7 7 Y 14 19 21 21 W 28.5

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A B Without auto switch With auto switch (All dimensions are common expect "A" and "B".)

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

): Dimension of the D-A96 D-A9V D-M9V D-M9WV D-M9AV Auto switch Auto switch Hs Hs A B A B 21.5 (23.5) 23.5 14.5 14.5 12.5 12.5 ( ): Dimension of the D-M9AV D-A7/A80 D-A73C/A80C D-A79W D-F7/J79 D-F7W/J79W D-F79F/F7BA Auto switch Auto switch Hs Hs Hs Hs A B A B D-A7H/A80H D-F7V/F7WV D-F7BAV D-J79C Auto switch Auto switch B A A B 10 Auto Switch Mounting Series CJ2Y Auto Switch Proper Mounting

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

SMC Pneumatic Clean Series

M 2 B 20 100 H N H7B 21 C D B M 2 B 20 100 H N H7B Nil Built-in magnet No Number of auto switches D With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...