ZQ-OM01401

) 4 3.2 () 5 4 () 24 - No.ZQ-OM01401-B ZS-39-5G ZQ1-LW6-N-A 1) N NPN P PNP (1) 3 Assy ZQ1-PL11-A 4 Assy ZQ1-FC1-A 5 (10 ) ZQ1-FE2-A 6 ZQ1-CV 7 V VVQ1000-50A-C4 (1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

A IN OUT t A-A BLEED w y Note Component Parts Material No.

IDX-OM-W011

IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded

tTV2000/3000

Rc(PT) 12 04 o Bracket B o o Bracket o o @ L-bracket Connection NPTl/4 N02 a o Connection NPT3/8 N03 a o o tr 6 . 9 o u t = ^ O v o EL o Connection NPTl/2 N04 o Connection G(PD 1/4 F02 o o Connection G(PR 3/8 F03 o o Connection G(PR 1/2 F04 o O: Standard specifications O: Combination possible Blank: Combination not possible Modular Connection Part Numbers muxm : Air filter NAF3OOO NAF4OOO

VFR5000-OMN0001

(N.O.)3 3 B A N.C.

.· Y14-M5-A applicable model: AC10□-A.· Y24-□01-A, 02-A applicable model: AC20□-A.· Y34-□01-A, 02-A applicable models: AC25□-A, AC30□-A.· Y44-□02-A, 03-A applicable model: AC40□-A.· Y54-□03-A, 04-A applicable model: AC40□-06-A.

IDX-OM-O004C

name label. 1 2 3 i.2.8 C A U T I O N !

IDX-OM-W053

CM PE FM1 PRS P FM2 PE CM FM 12 OLR PTC PTC ILS PRS TB PE GFCI EDV 6 3 6 6 4 2 6 4 7 A A 7 1 7 2 A m 3/h(ANR) 1) (50/60Hz) 0.32/0.375 10 1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-1 9 1 10 H 10 H 10-1 ( ) 10-2 () AD48-2-A 10 IDFA6E-20-H N.O. () 0.151.0MPa 10 1 10 H IDF-S1941 () 1 AD48-2-A 1 1) 2019 3 2019 2 SERIAL No.XP IDF-S1940

Exhaust Cleaner for Clean Rooms AMP Series

This prevents discharge to the outside for a fixed time. Element service indicator (optional specification) With indicator function The element life (standard) can be visually confirmed. First element (main element) Element service indicator Element clogging is detected by a pressure differential, and indicated by a red symbol.

IDX-OM-W014

10 KQ2H10-02AS IDU3E/6E/8E-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W014 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W014 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04 IDU3E-**-L IDU6E-**-L IDU8E-**-L N.O. () ) 0.151.6MPa ) 50L/min(ANR) IDU Series 9

IDX-OM-W023

10 KQ2H10-02AS IDU8E/11E/15E1-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W023 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W023 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04 IDU8E-**-L IDU11E-**-L IDU15E1-**-L N.O. () ) 0.151.6MPa ) 50L/min(ANR) RC1/2 IDU

VFR3000-OMY0001

N.O.3 3 1) 0.9MPa 2) 3) 50 4) 2 5) P ARBF3000,ARBF4000 ARBF3000,ARBF4000 ,P AB ARBF3050ARBF4050 A B P 1.0MPa 1) B A 0.10.83MPa 2) -560 () 3) N.C. N.O.

VEX-OMV0001

-2VEX-OMV0001 / *3) 1 1.5 *3)1 1 () [] -3VEX-OMV0001 VEX1 Series / / C-R ( )C-R SDS DC VEX1101, VEX1201, VEX1301 2% () VEX1501, VEX1701, VEX1901 3% AC VEX1101, VEX1201, VEX1301 20% VEX1501, VEX1701, VEX1901 15% (SSR)AC 1) (C-R ) OFF () 2)() P2 N.O.() ZNR 1V 0C () 4 VEX-OMV0001 VEX1 Series / () DC 1(P)2(A) 1 ()ISO VG32 1) 2 ( )ISO VG32 (SDS) M5 1/61/4 11.5Nm ) 2)R,

Vacuum Ejector with Solid State Timer, Series ZMA

The product cannot be used in a strong magnetic field.

Vacuum Ejector with Solid State Timer

The tensile strength of the power cord is 49N, and pulling it with a greater force can cause failure. Warning 1. Vacuum pressure switches There will be no change in performance if a pressure of approximately 0.5MPa is applied momentarily (when releasing vacuum), but care should be taken that pressures of 0.2MPa or more are not applied on a regular basis. Operating Environment 3.

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CTRL, M5(NOM 10/32), AIRLINE EQUIPMENT, AS FLOW CONTROL, AB, AS M5 STANDARD (PT), .06847 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm

Valve Direction: Single Solenoid on Opposite Side of A and B Ports, Stations: 04, A, B Port Size: M5 x 0.8

VXH

, Rc ) 2 x M5 x 0.8 x 8 2 1 For Rc 1/4, 3/8 334

Size: 2 (M5), Tube Size: 04 (Ø4), Exhaust Port: 04 (Ø4)

VXH

, Rc ) 2-M5 x 0.8 x 8 2 1 For Rc 1/4, 3/8 17-3-70