Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

2/3 Port Valve

How to Read The Graph In case of a water flow of 100 l/min.

XM, XY

117 C 31 39 45.5 D 53 61 80 E 75 87 114 Fn 95 110 Fd 52 70 83 G 104 126 150 H J K M XYC-50 XYC-63 XYC-80 178 209 268 29 36 44 10.5 9 9 78 99 116 487 Stainless steel High Vacuum Angle/In-line Valve 2 Stage Control, Single Acting/Bellows, O-ring Seal XMD, XYD Series PAT.

Large Bore Compact Cylinder Series CQ2

125 150 175 200 250 300 Reed switches: D-Z7, Z8 Solid state switches: D-Y5, Y6, Y7 Female threads Male threads 180 Single rod Double acting CQ2 200 Double rod New 180 and 200 Compact cylinder variations A wide range of 15 sizes from 12 to 200 Bore size (mm) Compact cylinder series 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 CQ2 Large bore CQ2 CQS Refer to N320 "CQ2" and CAT.E256-

Process Pump <Fluororesin Type> Series PA3000

0.4MPa 10 0.4MPa 0.3MPa SUP = 0.5MPa 0.3MPa 0.2 100 0.2MPa 0.3MPa 0.2MPa 5 50 0.1 0.2MPa 00 50 100 150 00 5 10 00 5 10 Air consumption (l/min [ANR]) Flow rate (l/min) Operating cycle (Hz) PAP3313-T13: Flow rate characteristics (2.5Hz)* PAP3313-T13: Flow rate characteristics (5Hz)* PAP3310-T13: Flow rate characteristics 0.4 0.5 0.5 Discharge pressure (MPa) Discharge pressure (MPa) Discharge

MU

Calculation: (Example) MUL32-100 Basic weight0.42 (Foot style 32 equiv.)

MU

Calculation: (Example) MUL32-100 Basic weight0.42 (Foot style 32 equiv.) Additional weight0.16/50 stroke Stroke 100 stroke 0.42 + 100 / 50 x 0.16 = 0.74 kg CQ2 RQ MU Construction D-X 20Data A A section MU25 Replacement Parts: Seal Kit Component Parts Bore size (mm) Kit no. Contents Description Note No.

Process Pump

Viscosity Transfer is possible up to about 100 mPas.

3

150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal type

PSE550/300

Model PSE30 Set (differential) pressure range 50 to 500 kPa 0.2 to 2 kPa 0.1 to 1 MPa 10 to 100 kPa 10 to 101 kPa 101 to 101 kPa Pressure range Note 1) For positive pressure For low pressure For vacuum For compound pressure For low difference pressure Rated (differential) pressure range 0 to 500 kPa 0 to 100 kPa 0 to 1 MPa 0 to 101 kPa 100 to 100 kPa 0 to 2 kPa 12 to 24 VDC, Ripple (p-p)

Bearing Type: M (Slide Bearing), Bore Size: Ø63 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 100 mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L [3m]

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket

Bearing Type: L (Ball Bushing), Bore Size: Ø16 mm, Port Thread Type: Bore 16: M5 x 0.8; Bore 20-100: Rc, Stroke: 100 mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal