•

(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

PA3000/5000/PAX1000

5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature C

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

1

Standard Strokes Bore size [mm] Standard stroke [mm] *1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 *1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

, 75, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16(15.8) 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 40 10 to 50, 75, 100 62 M8 x 1.25 50 13 16(15.8) 64 12 M8 x 1.25 8 86 7 14 12 50 6.6 11 26 14 71 10 Note) Figures in ( ) are the dimensions for applying a wrench.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

ITV

75 1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

KJ

K M H D Plug Insertion Force in Pressurized Condition MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Insertion Force of Series KK T 350 300 VMG 250 Insertion force N Series KK6 200 Series KK4 150 100 Series KK3 Series KK2 50 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate l/min (ANR) (SCFM) Note 3) 12 (0.42) 25 (0.88) 50

Process Pump Series PA3000/5000/PAX1000 Series PB1000

5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature C

IDX-OM-W014

/60Hz) CM 1 2 ILS FM PTC OLR PC 1 PTC PTC ILS CM AC200/200 (50/60Hz) AC230V (50Hz) PRS AC200/200,220 (50/60Hz) OLR C01 2 2 1 L C11 N TB PRS PE PC TB P FM C11 200V C11200V IDU6E-10 IDU6E-20/23 ILS ILS PTC AC200/200 (50/60Hz) AC230V (50Hz) PTC AC200/200,220 (50/60Hz) AC100/100,110 (50/60Hz) C01 L CM CM PC N OLR OLR PE TB PRS PRS FM P P FM C11 6-5 6 2 IDU Series 6-4 6 4 IDX-OM-W014

ZR

Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc. ZS-10-5A-50 . 1 pc. 13-3-13 13 Series ZR Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Guidelines for Use of Vacuum Pressure Switch Unit System circuit for work adsorption Set pressure When it is used for work adsorption, set the pressure so that adsorption is complete and reliable.

Compact Cylinder Series NCQ8

Mounting bolt C D Mounting Bolt Size for NCDQ8B056 to 250(With Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCDQ8B056-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B075-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B106-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B150-025 037 050 062 075 087 100 125 150 175 200 250

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

Clean Air Module

Accumulated pulse output P ON OFF Output mode OUT1 50 msec ON n OFF Note1) Note 1) Output mode is set to inverted output when shipped from factory.

Modular Type Air Filter Series AF

Replace the element every 2 years or when the pressure drop becomes 0.1MPa, whichever comes first, to prevent damage to the element. 0.02 0.02 00 00 2000 4000 6000 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) AF20 Rc 1/4 AF50 Rc 1 0.10 0.10 P1 = 0.7MPa P1 = 0.5MPa P1 = 0.7MPa P1 = 0.5MPa 0.08 0.08 P1 = 0.3MPa Pressure drop MPa Pressure drop MPa P1 = 0.3MPa P1 = 0.1MPa 0.06 0.06

A

(50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 Option D: Type D DIN terminal Nil G None With pressure gauge How to Order Pilot Valve Assemblies Y: Type Y DIN terminal SF4 1 G 80 Rated coil voltage 100VAC (50/60Hz) 200VAC (50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 For soft start-up valve Note) The grommet type can

Modular Type Regulator Series AR

60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option Note 1) 1 Symbol Nil B G Note 2) Applicable model AR25 to 60 AR25

PFxx-OMO0007CN

) AC1000 V1 50 M(DC500 V ) CERoHS (RcNPTG) 1/81/4 3/8 1/2 ADCNBRSUSPBTPtlrFeNiOFC 250 g 290 g 100 g 1 0.927= 20L/min 3 420 (1 atm)65R.H. 0 (1 atm) 4 mm PVC 1.14 mm AWG23 0.72 mm -36No.PF-OMO0007CN () a(L/min) b(L/min) PF2A710 A 1 10 PF2A750 B 5 50 PF2A711 C 10 100 PF2A721 D 20 200 PF2A751 E 50 500 -37No.PF-OMO0007CN PF2A710/750 PF2A711/721/751 -38No.PF-OMO0007CN ()ZS-37

99

70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100