Aluminum High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1.

Non-contact Gripper

Bernoulli Type Cyclone Type High lift Vibration reducing High lifting force: Max. 44 N* Amplitude of the workpiece during gripping: 0.01 mm*or less * Solar battery silicon cell (l125 mm, t = 250 m) * In SMC conditions (How to calculate: Page 730) Non-contact gripper * Outer body diameter: 100 Lifting force (Supply pressure: 0.4 MPa) Workpiece (Solar battery silicon cell) Amplitude 50 40

Compact and Lightweight

100 250 100 100 100 Vacuum pressure Vacuum pressure ZL Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 200 80 200 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] ZH ZH Air consumption 150 60 60 150 60 60 ZH Air consumption Suction flow rate 100 40 40 100 40 40 ZH -

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ C D MRQ D(Picture of MSQB1A) 20Measurements mm Size Model Mass (g) 70 105 150 250 A B C D MSQB1A 50.5 28 25 16 1 MSQB2A 56 30 28 18 2 MSQB3A 60 34.5 30.5 20.5 3 MSQB7A 73.5 41 34.5 23 7 Variety of installation options for space-saving Offers

CJ2

Standard stroke (mm) 45 stroke 59 114 Mountable (Band mounting style) Auto switch Bottom mounting style Mounting 60 stroke 67 135 Weight 75 stroke 154 100 stroke 192 125 stroke 226 150 stroke 250 Rod end nut is included in the weight. Construction (Not able to disassemble.) Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Note 6) Block, Auto switch capable, S and T only available as special. 6-14-3 4 Series NCM Specifications: Double Acting, Single Rod/Double Rod Specifications 075 (3/4") 088 (7/8") 125 (1 1/4") 200 (2") 106 (1 1/16") 150 (1 1/2") Bore size (in) Fluid Air Maximum operating pressure 250 PSI/1.7 MPa 8 PSI/0.06 MPa Minimum operating pressure 40 to 140F/5 to 60 F Ambient and fluid temperature

08-cs1-e

CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g). Order with the following part number when only the grease pack is needed.

10-cls-e

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

240

Note 4) When the stroke is 25 mm, the maximum speed will be 250 mm/sec. Note 5) Set to the pushing force when pushing. Note 6) The speed and force may change depending on the cable length, load and mounting conditions. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m.

LMU100/200 Series Mist Spray Unit

30 300 35 350 LMV20/Without air blow circuit T0806 (8 x 6) Applicable tubing Symbol Length T0425 (4 x 2.5) Applicable tubing Air adjusting needle for mist T0604 (6 x 4) Applicable tubing Oil adjusting needle Mixing valve (LMV20-) LMV201 L 46 (24) Double pipe nozzle AIR OIL D C B 12 E A 24 9.5 2 3 57(Max.) 12.5 AIR SMC 27.5 4 10 40 23.5 OIL L Dimension (mm) 20 200 25 250 30 300 35 350 7.5

Thermo-con/Rack Mount Type

Model Air flow [m3/min] Heat generation [W] HECR002-A 2 600 HECR004-A 5 1300 HECR006-A 5 1400 HECR008-A 7 1700 HECR010-A 7 2500 HECR008-W 0.2 200 HECR012-W 0.4 250 Operating Environment/Storage Environment Warning Facility Water Caution 1. Keep within the specified ambient temperature and humidity range.

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

Compressed Air Preparation Filter

14 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 12 10 Inlet pressure 0.5 MPa 6 10 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 6 4 6 4 4 2 2 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 150 0 50 0 300 250

Series AP3100

Please contact SMC. 2) Tested with Helium gas inlet pressure 250 psig (1.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 4) Optional lever color available. Please contact SMC. 5) Handle must be pulled to turn open from closed. 6) Refer to the specification for options.

HRX-OM-X037

Table 3.1-1 Weight of the product Model Weight kg Option increase HRL100-A-40 Approx.240 Option-D1:+1kg HRL200-A-40 Approx.260 Option-T2:+1kg HRL300-A-40 Approx.330 Option-T3:+18kg* HRL100-W-40 Approx.250 HRL200-W-40 Approx.250 *Applicable only to HRL300-A*-40. 3.1 Transport HRL Series 3-2 HRX-OM-X037 Chapter 3 Transport and Setting Up 3.1.2 Transportation using casters This is a heavy product

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

ITV

or less Current type IR Input impedance Approx. 6.5k Voltage type Straight type Right angle type Approx. 2.7k Preset input VEX 1 to 5V DC (load impedance: 1k or more) 4 to 20mA (sink type) (load impedance: 250 or less) Analog output (2) AW Output signal (monitor output) Switch output NPN open collector output: Max. 30V, 30mA PNP open collector output: Max. 30mA AMR Symbol Linearity Within

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

260.5 234 244 275 285.5 250 260 287.5 298 266 276 300 310.5 282 292 312.5 323 298 308 337.5 348 58 68 87.5 98 74 84 112.5 123 90 100 125 135.5 106 116 137.5 148 122 132 162.5 173 138 148 175 185.5 154 164 187.5 198 42 52 75 85.5 L1 L2 L3 L4 4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet (G) (35) (5.5) 2-4.5 mounting hole 43.5 (11) C6: