Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

3 Port Air Operated Valve

(Convertible) Standard 0.2 to 1.0 Operating pressure range (MPa) For vacuum 100 kPa to 0.2 Pilot pressure (MPa) 0.2 to 1.0 (Equivalent to the operating pressure or more) Ambient and fluid temperature (C) 10 to 50 (No freezing) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction to axis and right

IDUS/IDFS

Technical Data Pressure Dew Point Condensed Water Calculation Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 0.6 30 0.7 0.8 25 Amount of condensed water 20% Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse