EX500-GPR1A.eng

Confirm that the connector portion does not move. 14.9 Gray: Ground Black: DC24V 10% ( power supply for input and control ) Blue: 0V ( for input and control ) White: DC24V+10%/-5% ( for solenoid valves/output ) 18 48 34 Straight connector Type Angle connector Type EX500-AP -S EX500-AP -A 6 30 5 50 31.3 28.3 6 Socket Connector Pin Layout 4 3 1 5 30 5 50 2 B. Single power supply system A.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .2, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 8.07 in / 205 mm Width: 5.98 in / 152

Flow Rate: 4.2 CFM / 7.2 m3/hr / 119 LPM , 4.2 CFM / 7.2 m3/hr / 119 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .4, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 8.66 in / 220 mm Width: 5.98 in /

Flow Rate: 7 CFM / 12 m3/hr / 198 LPM , 7 CFM / 12 m3/hr / 198 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .6, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Net Weight: 22.7 lbs. / 10.3 Kg Series Configured Datasheet.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Large blow and

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

100 150 200 250 300 IRV Flow rate (L/min (ANR)) Inlet pressure (MPa) VEX ARP30(K) ARP30(K) Rc 3/8 SRH 0.50 0.25 SRP 0.45 0.40 SRF Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point VCHR 0.30 ITV 0.20 0.25 0.20 IC 0.15 ITVX 0.10 PVQ 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 VEF VEP Flow rate (L/min (ANR)) Inlet pressure (MPa) VER ARP40(K) ARP40(K)

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

100 150 200 250 300 Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP40(K) ARP40(K) Rc1/2 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet

EX260-SEC-A_eng

Designation Description 2 Fieldbus interface connector (BUS IN) EtherCAT connection (M12 4-pole socket, D-coded) 4 5 2 *1: Blinking pattern SV24 V +24 V for solenoid valve 1 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 5-pole plug, A-coded) 3 2 SV0 V 0 V for solenoid valve 200 ms 200 ms 1 SI24 V +24 V for SI unit operation 3 4 Ground

Flow Rate: 5.6 CFM / 9.6 m3/hr / 159 LPM , 5.6 CFM / 9.6 m3/hr / 159 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .59, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 9.8 in / 249 mm Width: 6.14 in /

AS-FPQ/AS-FPG

ASS ASR ASF Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

AS-FPQ/AS-FPG

Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Standard Stroke Table Bore size (mm) 20, 25, 32, 40 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 200, 250, 300 Note 1) Intermediate strokes not listed above are also available. Note 2) As the stroke increases, more sliding resistance may result due to the deflection of the piston rod and other factors.

Clean Rodless Cylinder Series CYP

Provides high linearity and high precision. 1 Series CYP How to Order CYP 15 Z73 200 Clean rodless cylinder Cylinder bore size Number of auto switches 15 32 15mm 32mm 2 pcs. 1 pc. n pcs. Nil S n Standard stroke Standard stroke (mm) 100, 150, 200, 250, 300 350, 400, 450, 500, 600, 700 Bore size (mm) Type of auto switch 15, 32 Nil Select auto switches from the table below.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

3 Port Solenoid Valve Base Mounted Type VQ100 Series Compact Design With Large Flow Rate High Speed Coil (ON: 3.5 ms) Long Service Life (200 million cycles) Innovative Manifold Construction Table of Contents Product Features .5 Specifications .6 How to Order .7-9 Plug-in Non plug-in Dimensional Drawings .10-14 Plug-in Non plug-in Construction .14 Operation Guide .15-18 The Preferred

PSxx-OMF0005CN

ON (+)ON 1 OFF ()ON OFF DC(+)DC(-) 2 ON 80 mA 3 () DC(+)DC(-) NPN PNP ( ) 4 OFF () ( ) 5 () DIN 6 -24No.PS-OMF0005CN-E No. 7 / ( 8 () ) -25No.PS-OMF0005CN-E ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 0.010.25 mm 0.030.50 mm (5 m) 30200 kPa 50200 kPa 1.5 20 50 kPa 5 10 L/min (ANR) 100 kPa 8 15 200 kPa 12 22 DC1224 V10 (p-p)10() 15 mA NPN PNP NPN PNP 1 1 1 80 mA 30 V(

EXxx-OMV0017-D

(Refer to the I/O Mapping Order of Wireless Base / Remote Module of the Operation Manual (page 50) for details) Mode 1: Assigned to the right from the end plate. Mode 2: Assigned to the left from the wireless unit. Unit address order Mode 1 Mode 2 Mode 1 Base unit setting buttons No. Name Functions 1 Save all Changed settings are stored in the equipment.

Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz): 100~120V no longer available; 200~230 (LECSS-S); 200~240 (LECSS-T); Display and settings buttons for direct input and status monitoring; LEC-MRC2 Configuration software required (sold separately); C-UL-US listed (LECSS2-T only)