EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

VQ4000

SOL.B SOL.A 10 10 () (+) White Black SOL.A Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types. Mixed single and double wiring is available as an option. For details, refer to below.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Brown: 24 VDC +10%/5% (Valve power supply) 1 White: 0 V (Valve power supply) 2 Black: (0 V (For control)) Blue: (24 VDC10% (For control)) 3 4 Made to Order Gray: Ground 5 Cable length 10 mm p. 247 Connections BCable with M12 Connector EX500-AC 030 SSPS Cable length (L) Connector specification SSPS Socket side: Straight, Plug side: Straight SAPA Socket side: Angle, Plug side: Angle 003 300

EXxx-OMN0037CN

(ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -21No.EX-OMN0037CN-A (2)2 2 010 V05 V020 mA 15 V420 mA AD (ab) AD (

E-P HYREG ® Series VY1 1

10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port

CQM

10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Pressure Gauge Guide

Model (Made to Order) Model Pressure rangeNote) Indication unit Connection thread Note MPa G46-2-01 to 02-C/ C1 G46-4-01 to 02-C/ C1 G46-7-01 to 02-C/ C1 G46-10-01 to 02-C/ C1 G46-2-01 to 02M-C/ C1 G46-4-01 to 02M-C/ C1 G46-7-01 to 02M-C/ C1 G46-10-01 to 02M-C/ C1 G46-4-02-X30 G46-10-02-X30 G46-2-02M-X4 G46-4-02M-X4 G46-7-02M-X4 G46-10-02M-X4 G46-2-02M-C/ C1-X4 G46-4-02M-C/ C1-X4 G46-7-02M-C

EXxx-OMQ0015CN

mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 4095 5.25 21 4095 10.5 5.25 21 3868 5 20 3901 10 5 20 2048 3 12 2048 5.25 2.625 10.5 228 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 3901 -48No.EX-OMQ0015CN (2) & 2 : 010 V,05 V,020 mA : 15 V,420 mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 2047 5.25 21 2047

10

F F 1 2 1 2 MHL2-10DZ MHL2-16DZ MHL2-16D Z MHL2-10D Z 60 60 25 25 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa Pressure 0.6 MPa 0.5 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 10

Cylinder

Pin Cylinder Index Double Acting With Auto SwItch Single Acting SIVC I Double Acting Series CJP/6, 10, 15 Specifications Double acting Action CJPB1S-300 7kgf/ cm' Max. oper~ting pressure 1.2kgf/cm' ~ 6' M in,-operati':l9 pr~ss,ure, '4>10,'4>15 0.6kgf/cm' Ploof p" reSsLire 10.5kgf!

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

Compact Cylinder with Air Cushion

If operated beyond the limiting ranges, excessive impact will occur and this may cause damage to equipment. 100 Lateral load F (N) 80 10 63 50 40 32 25 Operating pressure 0.5MPa Operating pressure 0.4MPa Graph 1 20 1 10 100 300 1000 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 Caution 100 Load weight kg 80 1.

RQ

D-X 100 Lateral load F (N) 2080 10 Data 63 50 Operating pressure 0.5 MPa Operating pressure 0.4 MPa 40 32 25 Graph (1) 1000 20 1 10 100 300 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 100 Load weight kg Caution 80 63 50 1.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

VCC

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 648 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

EXxx-OMS0026CN

Enable Val165000 4 ON 8 ON/OFF 3 Disable ON/OFF 0 83 9 ON/OFF Auto 10 HDX 10 BUS IN BUS IN 10 FDX 100 HDX 100 FDX Auto 10 HDX 11 BUS OUT BUS OUT 10 FDX 100 HDX 100 FDX 1Hold/Clear Via software 2PLC 330 4x1000 -44No.EX-OMS0026CN No.

HEC-OM-S008

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK UT CR 4.2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

IDX-OM-W023

M 10 M IDU8E/11E/15E1-10/20 10-1 ( ) IDU Series 10-1 10 1 IDX-OM-W023 10 M 10-2 ADM200 IDU8E15E1-10-M IDU8E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W (R1/2) (Rc3/8) Rc1/2 26 Rc1/2 IDU Series 10-2 10 2 IDX-OM-W023 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W023 11 R