msecwInput method: 4 point input with keys(Interval time can be set by programming.)12 VDC (Max. 300 mA) with accuracy of 12 to 14.4 VDC Note 2)24 VDC (Max. 300 mA) with accuracy of 22.0 to 26.8 VDCq0 to 10 VDC (Output resistance: 6.5 k or more with accuracy of 0.5%F.S. or less)w4 to 20 mA DC (Output resistance: 800 or less with accuracy of 0.5%F.S. or less)Output: 4 pointsOutput type
0.1 MPa500 kPaAir/Non-corrosive gas48 x 48 x 100.512 to 24 VDC (15 W or more), Ripple (p-p) 1% or lessqNo. of inputs: Up to 10 bit input from sequencer (parallel) Note 5) Input method: No-voltage contact or NPN open collector input Minimum pulse width: 50 msecwInput method: 4 point input with keys(Interval time can be set by programming.)12 VDC (Max. 300 mA) with accuracy of 12 to 14.4 VDC
Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder. 25 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) 25, 50, 75, 100, 125, 150 200, 250, 300 32 Mounting Bracket Part Nos. 40 Note) Intermediate strokes other than the above are produced upon receipt of order.
Coefficient factors Inlet air temperature (oC) 5 to 25 30 35 40 45 50 55 60 65 1.42 1.15 1.00 0.71 0.62 0.50 0.40 0.33 0.21 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 to 1.6 0.71 0.75 0.82 0.89 1.00 Ambient temperature (oC) 2 to 25 30 35 40 45 1.0 0.85 0.80 0.73 0.62 Calculation example: The air flow capacity when the dew point of IDFA60 is set to 10 oC under the following conditions <
msecwInput method: 4 point input with keys(Interval time can be set by programming.)12 VDC (Max. 300 mA) with accuracy of 12 to 14.4 VDC Note 2)24 VDC (Max. 300 mA) with accuracy of 22.0 to 26.8 VDCq0 to 10 VDC (Output resistance: 6.5 k or more with accuracy of 0.5%F.S. or less)w4 to 20 mA DC (Output resistance: 800 or less with accuracy of 0.5%F.S. or less)Output: 4 pointsOutput type
Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS
Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS
Rating(MPa): -0.1~1, Driving Type: Pilot Type Spool, Pilot Air Supply: External Mount, Seal Type: Standard, Plumbing: Direct Plumbing, Flow Coefficient (Cv): 8.9, Lead wire electrical entry: Grommet / Lead wire length: 300 mm, Indicator light / Surge voltage suppressor: With surge voltage suppressor, Option: With bracket, Body size: 50
Type: Pilot Type Spool, Pilot Air Supply: Internal, Seal Type: Standard, Plumbing: Sub-Base Plumbing, Flow Coefficient (Cv): 10, Lead wire electrical entry: Grommet / Lead wire length: 300 mm, Indicator light / Surge voltage suppressor: None, Option: With bracket, Body size: 50
Type: Pilot Type Spool, Pilot Air Supply: Internal, Seal Type: Standard, Plumbing: Sub-Base Plumbing, Flow Coefficient (Cv): 10, Lead wire electrical entry: Grommet / Lead wire length: 300 mm, Indicator light / Surge voltage suppressor: With surge voltage suppressor, Option: With bracket, Body size: 50
Piston Material: Aluminum, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～11, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 300, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～80, Support Type: Foot Perpendicular to Axis, Standard: JIS Specifications, Nominal Pressure
Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～14, Tube Material: Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 300, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～80, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard: JIS Specifications
Piston Material: Aluminum, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～3.5, Tube Material: Aluminum, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 300, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～80, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard: JIS Specifications
Piston Material: Aluminum, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.25～3.5, Tube Material: Aluminum, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 300, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～80, Support Type: [Rod Side Flange] Rod-Side Flange, Standard: None, Nominal Pressure: 3.5MPa
Piston Material: Aluminum, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.25～3.5, Tube Material: Aluminum, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 300, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～60, Support Type: [Rod Side Flange] Rod-Side Flange, Standard: None, Nominal Pressure: 3.5MPa
msecwInput method: 4 point input with keys(Interval time can be set by programming.)12 VDC (Max. 300 mA) with accuracy of 12 to 14.4 VDC Note 2)24 VDC (Max. 300 mA) with accuracy of 22.0 to 26.8 VDCq0 to 10 VDC (Output resistance: 6.5 k or more with accuracy of 0.5%F.S. or less)w4 to 20 mA DC (Output resistance: 800 or less with accuracy of 0.5%F.S. or less)Output: 4 pointsOutput type
Cooling Capacity: 300 (CH1: 26 kW; CH2: 1 kW), Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: CH2 w/Electric Conductivity Control, Pump Option: T3 (39 L/min, CH2 Optical Head, Size 300 Only)
Cooling Capacity: 300 (CH1: 26 kW; CH2: 1 kW), Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control), Pump Option: T3 (39 L/min, CH2 Optical Head, Size 300 Only)
Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 15, Stroke(mm): 300, Max.
Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 15, Stroke(mm): 300, Max.