FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

PSxx-OMM0002CN

kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.

SYA3000/5000/7000

kPa to 0.7 100 kPa to 0.7 (0.7 x P + 0.1) to 0.7 P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 10 to 60 (No freezing.)

5 Port Air Operated Valve SYA3000/5000/7000 Series

kPa to 0.7 100 kPa to 0.7 (0.7 x P + 0.1) to 0.7 P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 10 to 60 (No freezing.)

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

90

100 IR1000-A Series IR2000-A Series IR3000-A Series 50 50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

LFE-OMZ0012

Nominal thread size Appropriate tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm If the tightening torque is exceeded, the product can be damaged. If the tightening torque is insufficient, the piping may become loose. The product body is made of resin.

JXCx-OMT0034CN

11.1 . 30 11.2 . 30 11.3 . 30 11.4 . 32 12. . 33 12.1 . 33 12.1.1 . 39 12.2 IF ( ) . 40 12.3 (IO ) . 41 12.4 . 43 13.

JXCx-OMT0030CN

500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 9.CN2:TB/PC 22 - 6CN 61 1 EMG+ EMG 2 EMGEMG 3 24V + 5 4 3 2 1 4 0V 5 FG FG LEC UL , UL1310 Class2 62 AWG20 (24V0V) 60 EMG AWG20 EMG+,EMG60 8mm 23 - D (100 ) D 63 CN2SW(EMG+,EMG-) LECEMG CN2SW RY CN4 CN2 EMG+ EMG24V 0V CN2SW EMG+,EMG-(LEC) (LEC)EMG+,EMG-OPEN 24 - (LEC) LEC6 (DC24V 0V ) Ry EMG+ Ry

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

ZSE30/ISE30

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A