Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: QA (DeviceNetâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: AA (Direct

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: QA (DeviceNetâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate,

CM2

I Bore size (mm) -X 20 41 8 75 60 4 34 7 15.5 13 18 8 28 13 26 30 5 8 0 0.033 20 25 45 8 75 60 4 40 7 19.5 13 22 10 33.5 17 32 37 6 8 0 0.033 26 2032 45 8 75 60 4 40 7 19.5 13 22 12 37.5 17 32 37 6 8 0 0.033 26 40 50 11 82 36 66 5 52 7 21 16 24 14 46.5 22 41 47.3 8 10 0 0.039 32 Data With Air Cushion Built-in One-touch Fittings Bore size (mm) Bore size (mm) MM K NN ZZ NA Z N P S Q WB N1

SZ3000

Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Description Material Note 1 Body Spool Sleeve Spool valve Piston Pilot valve Aluminum die cast / Metal seal Stainless steel 2 Rubber seal / Aluminum NBR 3 4 Resin 33 Series VQZ Body Ported Type Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 65% Grommet (G): VQZ115G -N1, N3, N7, M5 2-N1, N3, N7, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for 5/32" N7: One-touch fittings

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

PSE200

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

ISO Cylinder

EE KK (WH) EE G2 4 x FF ND h8 NA NA F FX Width across flats K C 3 AM F FX N2 NA NA H N1 ZZ + Stroke S + Stroke Head cover axial port Boss-cut/Basic [mm] Dimensions Bore size AM C EE F FF FX G1 G2 H K KK N1 N2 NA ND S SW (WH) ZZ 20 20 8 G 1/8 30.4 M5 x 0.8 depth 9 22 22 8 30 6 M8 x 1.25 29 15 24 20 0 0.033 76 13 10 106 25 22 10 G 1/8 36.4 M6 x 1 depth 11 26 22 8 36 8 M10 x 1.25 29 15 30 26

SMC Pneumatic Clean Series

Width across flats NA S + Stroke LS + Stroke N2 X Y LT LX LZ ZZ + Stroke (mm) H H2 H1 S P N1 I GB D A 8 13 AL F K MM NA NN B1B2 Bore size 54 47 47 40 B LH LT LS LX LD N2 Z ZZ 6.8 4 LC LZ X Y 31 26 26 26 GA 16 13 13 13 149 GC WA WB WC 34.5 30 24 33.5 28 7 5.5 5.5 5 8 8 8 50 45 45 41 36 31 31 31 6 6 6 6 6 6 5 M26 x 1.5 M26 x 1.5 M20 x 1.5 108 82 80 80 15 11.5 10.5 8.5 40 32 25 20 M14 x 1.5

SS5Y3 16 STA MANIFOLD BASE. 0.828 lb. VVM.

SS5Y3 16 STA MANIFOLD BASE. 0.828 lb. VVM.

SS5Y3 16 STA MANIFOLD BASE.

CM2

50 75 100 48 61 73 86 111 136 36 18.2 25 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 18.2 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 18.2 40 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 54 67 79 92 117 142 167 46 20.2 Built-in One-touch fitting With rod boot With air cushion (mm) Symbol Bore ZZ Bore WA G N1

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V