Please contact us for the latest version.sales@ocaire.com, 20 STA, MFLD, BASE, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING 1.12994 lb ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

SMC

Z ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA

HRX-OM-T004

4.10.1 Circulating fluid discharge temperature . 4-17 4.10.2 Circulating fluid discharge pressure . 4-17 4.10.3 Circulating fluid discharge pressure . 4-17 4.10.4 Circulating fluid electric conductivity . 4-17 4.10.5 Status flag . 4-18 4.10.6 Alarm flag . 4-19 4.10.7 Circulating fluid set temperature . 4-21 4.10.8 Operation Start Command . 4-21 Chapter 5 Simple communication protocol function

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

55 79 141 0.4 11 32 45 80 0.3 8 24 34 60 0.6 17 47 68 121 28 79 113 201 Weights Standard Strokes (g) (mm) Body weight 80 105 130 210 210 320 640 830 Additional weight of magnet & rail 10 10 13 20 17 23 20 23 Model MXP 6 MXP10 MXP12 MXP16 Model MXP 65 MXP 6-10 MXP10-10 MXP10-20 MXP12-15 MXP12-25 MXP16-20 MXP16-30 Standard strokes 5, 10 10, 20 15, 25 20, 30 With shock absorber Shock Absorber

VXA31/32

VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly. Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

MHF2

thread MHC 26 74 10.6 MHT E MHY 20 20 24 33 MHW E MRHQ 2-4.3 through (Mounting hole) 0 -0.1 1.2 27 29 1.2 29 Misc.

MHF2

MRHQ 0.4MPa 30 0.3MPa Misc. 0.3MPa 10 20 0.2MPa D0.2MPa 10 2060 40 20 40 30 20 10 0 0 80 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa Pressure 0.7MPa 120 180 0.6MPa 0.6MPa 100 Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Z ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

Round Type Hydraulic Cylinder

Cotter pin 4 x 20 l (2 pcs.)

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

IDX-OM-W038

(2) 17. 18. 19. 20. () IDH Series 22 2.2 IDX-OM-W038 2. 2.2.2 6.2 IDF-AB500 1 2 600mm 600mm 600mm 600mm 600mm 600mm 600mm 600mm 1 2 IDH Series 23 2.2 IDX-OM-W038 2. 2.2.3 4040 3 2 121 2.2.4 10mm ( IDH Series 24 2.2 IDX-OM-W038 2. 2.2.5 ,(6-1 ) 1 2 3(0.61Nm) 4 5 (17) (17) 3 7 6 5 1 2 4 PE M3 6.5mm (N.O) 2 1.25mm (N.C) IDH Series 25 2.2 IDX-OM-W038 2. 2.3

Ionizer

Balance adjustment trimmer 4 x M4 x 0.7 depth 5 14 19 20 (For mounting, opposite side: Same) 13 17 7 Connection cable IZS31-CF-X210 14.9 16 20 20 52 (Cable length: Refer to the above table.) 65 8P modular jack (Plug for sensor cable) Maintenance detection level selection switch 15 100 4 x M4 x 0.7 depth 5 20 900 Connection cable length L (For mounting, opposite side: Same) 7 16 26 58 80x2

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Z 66 76 94 107 117 130 148 176 188 M 3.5 4 5 5 6 7 8 10 10 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5 17.5 19 20.5 21.5 24 26 30 32 TC 10.5 14 17 20 22.5 28 33 42 48 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Position for light mounting) Socket Terminal block Shaved part Terminal thread (3 positon) Hook Part No. of DIN Connector (Based on DIN) Without light AXT100-20-1 With light Rated voltage Voltage symbol Part No. 24V DC 12V DC 100V AC 200V AC 110V AC 220V AC 24V 12V 100V 200V 110V 220V AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Circuit with light

CRQ2

) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19 36 4 4 2.5 83 4 33 4 20 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 93 11 20 15 14 17 25 73 32.5 2 20 5 3.5 39.5 5 Dimension AU does not indicate the dimension when shipped because of the adjustment

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Top ported, Options: external pilot, built-in silencer, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, BASE MT, DIN RAIL MT, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING