AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04-12 12 18.5 30.8 43.7 (43.6) 35.1

Low Profile Guide Type

59 38 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51 10 19 66 53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13 27 84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port) Model XA T XL XY YB Z YA Shock absorber Model Nil TN TF CY1F10 CY1F10 D+0.012 0 M5 x 0.8 1 4 4 3.4 98 3 6.5 depth 3.4 RB0805X552 CY1F15 CY1F15 +0.012 0 M5 x 0.8

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

240

2 16 Step motor (Servo/24 VDC) 392 Electric Actuator Miniature Slide Table Type LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS6 D C B A 3.5 4 5.2 LEF 19 LEJ LEL ( ) +0.025 0 ( ) +0.025 0 2.5H9 depth 2.5 2.5H9 depth 2.5 2 x M4 x 0.7 thread depth 8 LEM LEY 4 x M4 x 0.7 thread depth 6 20 11 19 LES J 25 11 LEPY LEPS LEPY LEPS LER Table operating range Note 1) LEH Motor cable length 300

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 528 Series AS Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions AS-FE KE Reference dimensions Note 1) Dimension for AS1000-M5

RS2H-OM0045P

E2E-X2D1-N () DC1224V(DC1030V),(P-P) () 0.8mA 1.5kHZ () 3100mA (LED) (LED) -2570() 3595%RH 1 2 3V AC1000V 1055HZ1.5mmXYZ 2h 2(50G) XYZ 10 500m/S IEC IP67(JEM IP67G ) 1)100mA 2m 2) 8-2. -19-19-19-90 -19-19-1920 - 1. 2. 3. 1. 2. 3. 4. 5. 6. 7. 1. 2. 1. 2. 1. 2. 1. 2. 3. 1. 2. 3. () 4. 5. 1. 2. 1. 2. 1. ON (ON) 1. , 2. ON 3. 60 4.

CEx-OMI0064

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

Rotary Table

Push nut side (Piston) End cover assembly Hexagon socket head cap screw Hexagon socket head cap screw Cover assembly Fig. 24 Fig. 25 41 - Troubleshooting Problem Possible cause Solution Supply pressure is not applied correctly. Correctly set the regulator at the supply pressure side.

MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

LEF-OM006xx

9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V CN5 1 LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 2 100 500 100 500 1 1 200 1000 200 1000

JXCx-OMT0001CN

)(11)(3) OUT0 (7)INP ON (19)(11)(3) OUT1 (8)BUSY OFF (23)(20)(15)(12)(7)(4) INP No.1 (24)(21)(16)(13)(8)(5) BUSY (9)No.2(IN0 OFF IN1 ON) (10)DRIVE ON No.2 (11)No.2 ON (OUT0 OFF,OUT1 ON) (12)INP OFF (13)BUSY ON (14)DRIVE OFF (15)INP ON (16)BUSY OFF No.2 (17)No.3(IN0IN1 ON) (18)DRIVE ON No.3 (19)No.3 ON (OUT1OUT0 ON) (20)INP OFF (21)BUSY ON (22)DRIVE OFF (23)INP ON

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

Table of Contents - Tubing

TUB-19 TRBU Flame Resistant Double Layer Polyurethane TubingMetric ... TUB-20 PEAPP Polyurethane TubingInch/Metric . TUB-21 Related Equipment .

PSE200

Refer to pages 17 through 19 for general safety instructions and common precautions, and to pages 20 through 22 for specific product precautions.

ISA2

Note 3) With an O-ring (1 pc.) and mounting screws (2 pcs.). 16-8-18 19 Series ISA2 Specific Product Precautions 1 Be sure to read before handling. Air Catch Sensor Series ISA2 Pressure Source Caution Operating Environment Warning 1. Supply air Since the orifice of the air catch sensor is small, prevent foreign matter from entering the equipment.

Slider Type/Ball Bushing Bearing

2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

CXT

21 24 26 29 32.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 17 19 22.5 24.5 27 30.5 0 0 3.5 5.5 5 7.5 1.5 2 6 7 8 12 Bore size (mm) Long Stroke 12 16 20 25 32 40 19 21 24 26 29 32.5 11 10.5 16 18 20.5 26.5 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 17 19 22.5 24.5 27 30.5 9 9.5 13 14 12.5 16 Bore size (mm) Reed switch Solid state switch HS A B D-F7V D-J79C D-F7WV D-F7BAVL D-A7 D-A80 D-A73C D-A80C

Fluoropolymer Tubing Variations

(mm) TIL19 3/4" 3/4" x 5/8" 19.05 TIL25 1" 1" x 7/8" 25.4 TL0403 4 x 3 4 TL0604 6 x 4 6 TL0806 8 x 6 8 TL1008 10 x 8 10 TL1210 12 x 10 12 TL1916 19 x 16 19 TIL01 1/8" TILB01 1/8" 1/8" x 1/16" 3.18 TIL05 3/16" 3/16" x 1/8" 4.75 TIL07 1/4" 1/4" x 5/32" 6.35 TIL11 3/8" 3/8" x 1/4" 9.53 TIL13 1/2" 1/2" x 3/8" 12.7 1/8" x 0.086" Basic diameter 3.18 +0.2 0.1 +0.2 0.1 1.6 0.15 1 0.1 Tolerance

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

CXT

21 24 26 29 32.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 17 19 22.5 24.5 27 30.5 0 0 3.5 5.5 5 7.5 1.5 2 6 7 8 12 MXF Bore size (mm) MXW MXP Long stroke 12 16 20 25 32 40 19 21 24 26 29 32.5 11 10.5 16 18 20.5 26.5 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 17 19 22.5 24.5 27 30.5 9 9.5 13 14 12.5 16 MG Bore size (mm) MGP MGQ MGG Reed switch Solid state switch @ HS A B D-F7NWV D-F7BWV D-F7NV