AZ1000

140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

5 6 27.8 29 32 37.5 27 34 37 50 28.5 30.5 33.5 37.5 20H9 28H9 32H9 35H9 35h9 40h9 48h9 54h9 17 19 24 28 20 22 22 24 6.8 8.6 8.6 10.5 11 14 14 18 6.5 8.5 8.5 10.5 12 14 14 19 34.5 46 50 63 60 76 84 100 4.5 6 6.5 10 46h9 61h9 67h9 77h9 4 6 4.5 5 20 27.5 29 38 9.5 12 12 15.5 45h9 60h9 65h9 75h9 8 10 10 12 6.6 7.6 7.6 10 55.4 70.8 75.4 85.4 YC YB YA XC XB XA WF WD WC WB WA UU SU SF SE SD S Q

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

3 Port Air Operated Valve

15 16 17 18 19 20 stations Station n L1 L2 1573

Modular Type Air Filter Series AF

C 10 14 18 20 D 40 53 70 70 P 57 73 73 B 97 129 165 169 A 40 53 70 75 AFD20 AFD30 AFD40 AFD40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B 97 142 178 182 B B AFD20 AFD30 AFD40 AFD40-06 162 198 202 137 173 177 136 172 176 34

80

C R E (AC type) [mm] Model Port size P B B1 C D E F B B1 2 x P Port size VDW1 M5(M6) 20 10 46.1 15 9.5 11 VDW2 M5(M6) 22 11 50.9 20 9.5 13.5 Mounting bracket dimensions Electrical entry Model Port size P U W X Y Grommet Q R VDW1 M5(M6) 28 11 34 17 15.5 30.35 VDW2 M5(M6) 33 14 39 20 17 33.9 464 A Compact Direct Operated 2 Port Solenoid Valve VDW Series Air Medium vacuum Water Dimensions

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

PSxx-OMR0001CN

DCVX2 (2 )VX2 -37No.PS-OMR0001CN-J 3 ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 2.6 ISA-14 -38No.PS-OMR0001CN-J 3 () ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 ISA-20 E210-U01 2 ISA-17 2.6 2.6 Y200T-A -39No.PS-OMR0001CN-J 3 () 2 2 E210-U01 ZS-31-C ZS-31-C ZS-31-B Y200T-A Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-40No.PS-OMR0001CN-J 4 80 kPa220 kPa

IDX-OM-W094

-A IDFA70-20-A IDFA80-20-A IDFA90-20-A 10 m 3/min(ANR) 186 300 462 576 10 1) ANR 65% 2) IDFA60/70/80/90 Series 8-1 IDX-OM-W094 A 8.5 IDFA60/70/80/90 Series 8-2 IDX-OM-W094 C 9 C 9.1 9.2 1) 2) IDFA60/70/80/90 Series 9-1 IDX-OM-W094 L 10 L L 10.1 0 () 10.2 ADH4000-04 ADH4000-04 ADH-E400 ADH-E400 N.O. 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFA60/70/80/90 Series 10-1 IDX-OM-W094

ML1C

120 53.5 28 40 242 36.5 30 6.8 6.6 M6 x 1 12 16 116.5 M8 x 1.25 14 M10 x 1.5 372 354 186 190 124 158 118 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 AA BB CC DD EE FF GG II JJ KK LL MM NN WW XX ZZ Model ML1C25 ML1C32 ML1C40 1/ 8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 8 D1/ 8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 8 1/ 4 30.5 6 5 6 5 8 47 17 62 30 22 16.5 170 51 10 -X 1113 ML1C

Process Pump

2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 ASG22F-M5 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 M5 x 0.8 6, 10, 16, 20 R1/8 20, 25, 32 R1/4 20, 25, 32, 40 R3/8 40, 50, 63 R1/2 63, 80, 100 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa Ambient and fluid temperature 5 to 60C (No freezing) Number of needle rotations 10 turns

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

PA300/500/700

Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

K35-OMX0029

Signal name Input/output status Description 1 Sig-in+ Input 4-20 mA analog input signal (+) 2 Sig-inInput 4-20 mA analog input signal (-) 3 JOG+ Input JOG operation signal (Move to the extended end direction) 4 JOGInput JOG operation signal (Move to the retracted end direction) 5 PWR_DC24V DC+24 V Power supply 6 PWR_GND Power supply GND 7 Pos-out+ Output 4-20 mA analog output signal (+) 8

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch

LECA6_C

53 - 14 / 141.

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.