Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Screwdriver Operated Style), Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket), CE Compliant: Q (CE Compliant)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal w/Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Manually Operated), Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket), CE Compliant: Q (CE Compliant)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: None, Manual Override: None, Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket), CE Compliant: Q (CE Compliant)
Function: 2 Position Single, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Screwdriver Operated Style, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: CE Compliant
Function: 2 Position Single, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: Light & Surge Suppressor, Manual Override: Manually Operated, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: CE Compliant
Function: 2 Position Single, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.6m, Surge Suppressor: None, Manual Override: None, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: CE Compliant
Function: Normally Closed, Piping: Base Mounted, Body Option: Standard, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: Surge Suppressor, Manual Override: Push-turn Locking Slotted Style, Port Size: -, Option: -
Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: G (Grommet Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: S (Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style)
Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style)
Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot
Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: D (Screwdriver Operated Style)
Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot
Type of Actuation: 2 Position Double, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: Grommet Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Surge Suppressor, Manual Override: Push-turn Locking Slotted Style, A, B Port Size: -, Thread: -, Option: -
Series: 1 (VQZ1000), Configuration: 4 (3 Position Exhaust Center), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: M5 Thread, Thread: Rc, Foot Bracket: None, CE Compliant: Q (CE Marked)
Manifold Type: 41 (Base Mounted), Valve Stations: 5 Stations, A, B Port: M5 (M5X0.8), CE Marked: Q (CE Marked)
AS Release ring How to Order Slide range 0P AS 0 06 06 20 Body size q qSlide down the release ring, and push the release bushing to the end.
None Float type auto-drain 00 11 q Replacement Parts AU100 has no auto-drain type. Element Bowl guard Material Model Port size Description No.
Assembly example qResidual pressure relief 3 port solenoid valve VP517Y-5DZ1 1 pc. wAir combination AC30C-03DG 1 pc. eSpacer with bracket Y300T-A1 pc. tPiping adapter *1 *2 rSpacer Y300-A1 pc. tPiping adapter E300-03-A1 pc. q Residual pressure relief 3 port solenoid valve Applicable Combinations/Attachment Part Nos.
VXB Solenoid Specifications VXE Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C) (Rated voltage) 7.5 6 60 50 Frequency (Hz) 50 53 18 60 44 12 Power source VXP AC VXR VXH VXH How to Order VXF VXH2230 02 1 G Symbol 2 VX3 CE-compliant VXA 2 port valve for high pressure CE-compliant Nil Q 1 For DIN terminal only Bracket Valve/Body None With bracket Nil
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.