COQ2BP

= Kv 0.856 gl kgl N 453.6 0.4536 4.4482 Flow rate NVmin x 0.035 = SCFM Key psi = pounds per square inch kPa = kilopascals aim = atmospheres J = joule MJ = megajoule SCFM = Std. cubic feet per minute gf = gram force kgf = kilogram force N = newton Ibf = pound force N m = newton meter IJm = mm = em = micron (micrometer) mi llimeter cen timeter Basic Formulas Circle circumfe rence =ItO = 2m

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DAVor less 15Vrms or less _ Lea _ k '-, age current 10,UA or less at 24VDC 1 .SmA or less At OFF, the red color LED lights Indica,tor lamp At ON, the green color LED lights At OFF, the red coil)( LEO lights --f Operating time 1 m sec or less 2m sec or less D-PHl Lead wire entry Grommet ~---f-~~~ O~PH1L(Z ) Flame retardIng and oil proof Vinyl Flame retarding and oil proof vinyl Lead wire

7

VX3 Conduit (With surge voltage suppressor) VXA Flat terminal 2A 2B 2C 2D 2E 2F 2G 2H 2V 2J 2K 2L 2M 2N 2P 2Q 2R 2S 2W 2T 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Made to Order Produced upon receipt of order. Please contact SMC for lead times.

3

1H 240 VAC 1V 24 VAC 1K 48 VAC Conduit terminal With surge voltage suppressor Special voltage VXP VXR 1L 220 VAC 1M 240 VAC 1W 24 VAC 1P 48 VAC Conduit With surge voltage suppressor VXH VXF 1Q 220 VAC 1R 240 VAC 1Y 24 VAC VX3 VXA 2A 24 VDC 2B 100 VAC 2C 110 VAC 2D 200 VAC 2E 230 VAC 2F 48 VAC 2G 220 VAC 2H 240 VAC 2V 24 VAC 2L 100 VAC DIN terminal With surge voltage suppressor With light 2M

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code on LCD Pressure display 3 1:2 Digit LCD 110mmsize numerals) SeH olagnosls functloo ("10\002) Excess current) .Excess pressure,Data error,Pressure during O-clear 050'C Operating temp. range Analog Output Characteristics 1000Vp-p putse WIdth I }.I S standing 1ns Noise resIstance Voltage resIstance Between whole wires and case 1000VAC SO/60Hz for 1min. 5V Between whole wi res and case 2M

ZSE5/ISE5

Emergency display Display: Red/display the error code on Lt;;D Pressure display 3 1/2 Digit LCD Se ~ diagnosIs functIOn Excess pressure/Data error/ NoIe2) Excess current/Pressure during O-clear Operating temp.range O~50 'C I Bottom mode Noise resistance 500Vp~p pulse width 1 itS standing 1 nS fbl/nn lULl Insulation resistance Between whole wires and case 2M Q (SOVDC by megameter) Vibration

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Data error 1 (Excess current Note 2) I Pressure dUring a-clear SeH diagnosis fU nctKXl O-SO'C Operatirq temp range 500Vp . p pulse Width '",S standing ' nS NOise resistance Belween whole wires and case 2M n (50VDC by megameter) Insulation resistance Inn ILIU Vibration resistance to.5ooHz width=I 5rrm or acceleration lOG (Choose the smaller VibratIOn) to X , Y .

MY1

For ordering the lead wire cover separately, use the following part number: MYM63GAR6386-1640 (Length: 2m) 1. Auto switch mounting position Up to 4 auto switches can be mounted on one side of the cylinder (total of 8 switches on both sides). When multiple auto switches are used, be sure to use the lead wire groove and pull the lead wires out from the edge of the cylinder.

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: K (Operation Manual, Calibration Certificate)

Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: J (Vacuum Break Flow Adjusting Needle, Round Lock Nut), 1st Nominal Nozzle

Input Specification: 0 (Voltage Input), Output Specification: 3 (PNP Open Collector 2 Outputs Switching Type + Analog Voltage/Auto-shift Function Switching Type), Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire w/Connector, 2m), Bracket/Panel Mount: B (Panel Mount Adapter)

H (High Precision), Motor Mounting Position: Top Mounting, Motor Type: T8 [AC Servo Motor, (Absolute Encoder), 400W], Lead: B (10mm), Stroke: 800mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 2m

Accuracy: -, Size: 32, Motor Type: S7 [AC Servo Motor (Absolute Encoder), 200W], Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 250mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 2m, Driver Type: -, I/O Connector: -

Accuracy: High Precision Type, Size: 32, Motor Type: S7 [AC Servo Motor (Absolute Encoder), 200W], Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 350mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 2m, Driver Type: 100V to 120V, I/O Connector: -

Type: 3 Cores, 1 Output, 2m

Type: 4 Cores, 2 Outputs, 2m

Type: w/Connector Cover,3 Cores, 1 Output, 2m

Type: w/ Connector Cover, 4 Cores, 2 Outputs, 2m

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket