5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Non-locking) 1/8 (P , EA, EB port) 1.8 (Ventilation hole) 2 2.2 die-cast hole (For manifold gasket positioning) SYA5 20-01 3 4 5 3 position closed center/exhaust center/pressure center SYA5 20(-F2) C4, N3 C6, N7 C8, N9 3 4 5 1/8 (A, B port) 2-M5 x 8 (Pilot port) 2 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" 2 3.2 (For mounting

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

1 Direct Operated Solenoid Valve Metal Seal Series VS4 10 Model Flow characteristics Max. (1) operating cycle (cpm) (3) VK Response (2) time (ms) Weight (kg) Model Port size Rc (Nominal size) Number of positions JIS Symbol P A/B A/B EA/EB VZ C [dm 3/(sbar)] C [dm 3/(sbar)] b b Cv Cv AC DC AC DC AC DC VS4110-01 (6A) 3.2 3.2 0.42 0.37 0.86 0.80 1 8 2 (Single) 1,200 180 13 or less 45 or less

HRX-OM-Q026

OFF Contact input signal 2 type ALT Contact input/output communication Contact input signal 2 delay timer (time delay) of reading ---(0)*8 Contact input signal 2 OFF detection timer ---(0)*8 Contact output signal 1 function RUN Contact output signal 1 operation A Contact output signal 1 selected alarm ---(AL.01)*8 Contact output signal 2 function RMT Contact output signal 2 operation A Contact

HRX-OM-S004

A Contact output signal 1 Sets alarm which is selected for contact output 1. ---(AL.01)4 selected alarm Contact output signal 2 Sets output signal function of contact output 2. RMT function Contact output signal 2 Sets output signal operation of contact output 2. A operation Contact output signal 2 Sets alarm which is selected for contact output 2.

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Vacuum

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.

Vacuum

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.3 Cylinder-Applicable Pad (See also section for ZP Vacuum Pads, p

HRX-OM-M090

A Contact output 1 selected alarm Sets alarm which is selected for contact output 1. AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2.

HRX-OM-W032

OFF Contact input/output communication Contact input signal 2 type ALT Contact input signal 2 delay timer (time delay) of reading ---(0)*7 Contact input signal 2 OFF detection timer ---(0)*7 Contact output signal 1 function RUN Contact output signal 1 operation A Contact output signal 1 selected alarm ---(AL.01)*7 Contact output signal 2 function RMT Contact output signal 2 operation A Contact

HRX-OM-R016

A Contact output 1 selected alarm Sets alarm which is selected for contact output 1. AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2.

HRX-OM-R005

A Contact output 1 selected alarm Sets alarm which is selected for contact output 1. AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2.

HRX-OM-W038

A Contact output 1 selected alarm Sets alarm which is selected for contact output 1. AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2.

HRX-OM-O021

A Contact output 1 selected alarm Sets alarm which is selected for contact output 1. AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2.

Booster Regulator/Air Tank

: C EXH: C Spare port Rc1/2 (A) AMR D D (A) (B) (B) OUT OUT 305 Tank OUT port Rc1/2 ARM 216 216 180 4 x 13 4 x 13 50 50 ARP Drain valve 100 100 Drain port Rc1/4 IR-A 200 200 400 700 678 IR Booster regulator model A B C D VBA20A 481 394 Rc3/8 VBA40A 520 429.8 Rc1/2 VBA22A 444 394 Rc3/8 469 VBA42A 477 429.8 Rc1/2 493 IRV The length may be longer than the specification if the plugs mounted

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

Series AP500

Connections inch (mm) A 0.88 (22.4) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) FV4 MV4 TW4 FV6 MV6 TW6 3.70 (94.0) 2.96 (75.2) 4.70 (119.4) 2.96 (75.2) Flow Characteristics AP1100 Inlet pressure: 2 psig (14 kPa) 760 0 700 -8 Delivery pressure (mm Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 Flow rate (slpm, N2) Hastelloy is a registered

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

5 Port Air Operated Valve Series VFA3000 1

2 position double 3 position closed center 3 position exhaust center 3 position pressure center VFA3122-01-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230