Clamp Cylinder with Lock Series CLK1

Pin Dd9 2-3 L 4 4 D L Part no.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

M5 x 0.8 M4 x 0.7 NDh8 Z S 12-0.027 10-0.022 4 5 122 121 66 65 0 0 Foot (L): CJ2WL, CJ2WL 10112122View E Mounting nut Relief port 2 x M5 x 0.8 GA GA NN GC F MM NN GC F Rod end nut Cover surface Piping port 2 x M5 x 0.8 MM D D LY LB LH LZ LX LT LT Y NA X S + Stroke H NA Y A X 4 x LC Mounting hole A H + Stroke Z + 2 x Stroke C B 0 0.3 B 0 0.3 Drawing of view E (mm) Bore size 16 10 15 15 B LT

5 Port Solenoid Valve SY Series

39.4 20 (23.9) (P port) 1/4 0.9 31.5 [38.5] 2 18 40 EA P EB 24.5 28 For manifold gasket positioning 22.2 die-cast hole 36 (EA, EB port) 1/8 39.4 L plug connector (L) : SY7120-L(-F ) C8, N9 C10, N11 1 2 M plug connector (M): SY7120-M(-F ) C8, N9 C10, N11 1 2 DIN terminal (D): SY7120-D(-F ) C8, N9 C10, N11 1 2 M8 connector (W0): SY7120-W0(-F ) C8, N9 C10, N11 1 2 Applicable cable O.D. 3.5 to

5 Port Solenoid Valve, Series VQC

(SIGNAL) 4 3 () Circuit power supply V 3 1 4 () Sensor power supply SW 3 Signal H CAN_H 4 Sensor input signal SIGNAL 4 5 Signal L CAN_L 5 Sensor ground E 5 In the case of 4-input block unit (EX250-IE2), this is the sensor input signal.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger option Nil: Basic

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Cylinder with Lock

Bore size Dd9 L l m d (Drill through) Applicable split pin CD-M03*1 32, 40 10 0.040 0.076 44 36 4 3 3 x 18L CD-M05*1 50, 63 14 0.050 0.093 60 51 4.5 4 4 x 25L CD-M08*1 80, 100 22 0.065 0.117 82 72 5 4 4 x 35L Part no.

2/3 Port Valve

MainPort Rc(PT) Pilot port Rc(PT) A Model B C D E F H J K L 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 1 4 1 2 1 1 2 VNC5-32A VNC6-40A VNC7-50A 4.2-24 VNC Port size: 32A, 40A, 50A Flange connection Applicable flange Pilot port Rc(PT) A Model B C D E F H J K L 32 40 50 1 8 1 4 1 4 130 150 180 210.5 226 250

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

2: Clear / PD Out invalid 4..5 Idle output (IO-Link) 0: Clear 1: Hold 2: Force ON 6..7 Idle output (DO) 0: 2 / 2 / 2 / 2 1: 4 / 4 / 4 / 4 2: 8 / 8 / 8 / 8 3: 16 / 16 / 2 / 2 4: 32 / 2 / 2 / 2 Process data mapping Port1/Port2/Port3/Port4 (Input and Output) 4 0..7 0 L+ control Port 1 0: L+ ON, 1: L+ OFF 1 L+ control Port 2 0: L+ ON, 1: L+ OFF 5 2 L+ control Port 3 0: L+ ON, 1: L+ OFF 3

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

CXWM/CXWL

0 4-3.2 through 4-6.5 counterbore depth 3.3 2 x 2-M4 x 0.7 thread depth 8 2-RB0805-X552 Shock absorber (mm) ZZ Z SS S Q P L Model F Note) For 25 stroke, the shock absorber is mounted on a plate.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Model L A B n D E F LEFS25lll-50l 210.5 56 160 4 20 LEFS25lll-100l 260.5 106 210 4 LEFS25lll-150l 310.5 156 260 4 LEFS25lll-200l 360.5 206 310 6 2 240 LEFS25lll-250l 410.5 256 360 6 2 240 LEFS25lll-300l 460.5 306 410 8 3 360 LEFS25lll-350l 510.5 356 460 8 3 360 LEFS25lll-400l 560.5 406 510 8 3 360 LEFS25lll-450l 610.5 456 560 10 4 480 LEFS25lll-500l 660.5 506 610 10 4 480 LEFS25lll-

MXW

A F F L = 200 mm F L = 200 mm A L L MX L L = 200 mm MTS A MXW8/12/16 MXW8/12/16 MXW8/12/16 MY 0.03 0.03 0.10 CY MXW12 MXW8 MXW16 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXW12 MXW8 MXW16 0.08 MG MXW12 MXW8 MXW16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

CHKD/CHKG

Related Products F with effective thread depth G DC H 2 x K through 4 x L counter bore M 4 x CD LW D LH LT B + Stroke X1 X1 E LX BB Y1 SS Z + Stroke LA + Stroke 32 to 100 (mm) Bore size (mm) LA B BB C F L CD D E G H K LH LT LX 20 25 32 40 50 63 80 100 76 6.6 9.5 depth 5.4 43 12 70 10 18 10 M8 x 1.25 6 5.5 23 15 58 78 6.6 9.5 depth 5.4 45 76 14 12 18 M10 x 1.5 12 6 5.5 26 15 64 11 depth 6.5

C95

, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 25 100 105 105 120 125 130 1, 2 F5NTL 15 + 55 (n 2)/2 25 + 55 (n 2)/2 100 + 55 (n 4)/2 105 + 55 (n 4)/2 105 + 55 (n 4)/2 120 + 55 (n 4)/2 125 + 55 (n 4)/2 130 + 55 (n 4)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12,

Wedge Cam Operation Provides

MHZ2 Thermal proof 2 Grooves for auto switch on both sides 4 MHZJ2 MHQ Cylinder bore X4 F MHK D 1 L 2 MHK 2 L D 1 F Cylinder bore X41 MHL2 Finger material Dust cover material Finger material MHR Action Action The packing class has been revised to adopt thermal proof materials for use at high temperature of up to 100C. MHK Possible to select the auto switch mounting side.

Integrated Controller

5 42 Body mounting reference plane (B dimension range)1 4 x M6 x 1.0 thread depth 12.2 21 44 5.5 60 5 H9 (+0.030 0 ) depth 5 L + Stroke (16) (66)[64]4 10 (62) A + Stroke (Table traveling distance)2 62 (174.9) 64[(66)]4 Stroke Parallel I/O connector (M12) (70) Origin end3 [Opposite end]4 Opposite end [Origin end]4 Setup communication connector (M12) 48 (4)[2]4 2[(4)]4 22 (84.8) 6.5 30 Power

Rotary Actuator

F CRQ2X MSQX BC CB CB BC U UU MRQ A port B port C BB BB M 2 x Port size N A SB BA BA 0 0.2 G S D (g6) L 0 0.2 D is the shaft dimension.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

(A, B port) 7 Manual override 2-1.8 (For monifold mounting) (Light/surge voltage suppressor) Bracket 2-3.2 equivalent (For mounting) (18.5) 28 [35] + (18.5) 22.1 13.5 12.6 15 (11.5) 0.5 10 R P R 1.2 (PE port) 14 M3 x 0.5 (P, R port) L plug connector (L): SYJ3 20-L-M3 (-F) M8 connector (W0): SYJ3 20-W0-M3 (-F) M plug connector (M): SYJ3 20-M-M3 (-F) 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire