PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

Square Tube Type Air Cylinder Series MB1

Seal kits consist of items 12, 13, 14 and 16 contained in one kit, and can be ordered using the order number for each respective tube bore size. 13 Series MB1W Standard Type MM MM G VW 2-Rc(PT)P G Cushion valve Port Basic type/(B) E D D E e MB Effective thread Effective thread 13 f 16 h 9 2 x 4-J N F l H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot MM 2-Rc(PT)P G G

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

3 Way,3 Port Solenoid Valve NVZ Series

22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

MQQ

(Except clevis style) B L F G C (1) MK(2) 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 RS Q G Dealing with the stroke by the 1 mm interval is available by installing a spacer with the standard stroke cylinder. RS H A Function D (2) Nil HNote) Standard type High speed/High frequency type (Without fixed orifice) RZQ Note) Except 6 mm bore size.

MQQ

2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

5 Port Air Operated Valve

Thread type (Including pilot port) Body model Nil F N T Rc G NPT NPTF Symbol VFA5000 VFA1000 Note) VFA3000 2 3 Note) Manifold only M5 is available with Nil only.

High Vacuum Angle Valve

Revision History The XLC/F/G series has been added. Number of pages increased from 12 to 24. UR Edition B The XLAV-2/FV-2 has been added. Heat-resistant 2-color indicator solid state auto switch has been added to the high-temperature type. Number of pages increased from 24 to 28.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x

1

2 x NN Width across flats KA Width across flats KA H1 2 x Eh8 G Port thread Width across flats B1 Female thread MM Depth A1 NA D MM AL A F H ZZ + Stroke S + Stroke F 1.5 1.5 Effective thread length 2 x FL NA H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 D E F FL H H1 KA MM NA NN Bore size A1 H MM 20 14.5 12 13 8 18 0 0.033 11 8.5 30 5 Width across flats 6 length

17

x G F 2 x H E C D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

HRX-OM-X084

Piping thread type : When F is selected, G thread adapter set will be added.

KJ

) Applicable tubing (mm) Effective area (mm 2) Connection thread R Weight (g) L2 L3 L4 A Model M d L1 I.D.

RLQ

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

CLQ

CLQ Without auto switch B 40 30 D F F9BW S CDLQ With auto switch Number of auto switches Thread type Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.

RHC

A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000 6 1

Digital Flow Switches

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Lubrication Equipment

(Example) 23-R 1000cm3 tank 12 14 20 1 1 2 2 1 4 1 1000cm3 tank with switch (Bottom limit ON) 80 90 1 2 2 1 VY 1000cm3 tank with switch (Bottom limit OFF) Metal bowl With drain cock Nylon bowl (Including sight glass) Metal bowl with level gauge JIS Symbol G Thread Rc(PT) NPT G(PF) N F AL Option Combinations Available Not available Accessary, options Options Symbol 1 1S-1 1S-2 2 3 6 8 R 1

CQS

(2 color) D-F9PW 5.3-66 3 wire, PNP, In-line (2 color) D-F9BW 5.3-66 2 wire, In-line(2 color) Solid state switch D-F9NV 5.3-39 3 wire, NPN, Perpendicular D-F9PV 5.3-39 3 wire, Water resistant D-F9BV 5.3-39 2 wire, Perpendicular D-F9NWV 5.3-66 3 wire, NPN, Perpendicular(2 color) D-F9PWV 5.3-66 3 wire, Water resistant(2 color) D-F9BWV 5.3-66 2 wire, Perpendicular(2 color) D-F9BAL 2 wire, In-line

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Basic style: MGGB 20 to 50 4-F through, counterbore G Bottom 4-H M N HR HN (MAX.)