Manifold Regulator Modular Type ARM2500/3000 Series

Number of stations 02 2 stations Port size (OUT side) Symbol Port size 02 03 1/4 3/8 Applicable model ARM2500 ARM3000 10 10 stations Thread type Nil Rc F N G NPT Piping ARM3000 Symbol A B Type Common IN Individual IN IN From end plate From OUT port or G port Standard Specifications Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Regulating pressure range 0.05 to 0.85 MPa ARM2500

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

The G thread is unavailable. If it is required, select the R thread type (Nil) instead. Please contact SMC regarding the connection thread NPT and pressure gauge supply for psi unit specifications. Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

Series 10-MGF Guide table ø40, ø63, ø100

Series 10-MGF Guide table 40, 63, 100 How to Order 10 M G F 63 50 Y59B Number of auto switches 2 pcs. 1 pc. 10 Clean series Relief type Nil S Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Bore size Type Rc NPT G Symbol Nil TN TF 40, 63, 100 Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action

MRQ

F: Angle adjustable range 5 E: Angle adjustable range 5 E: Angle adjustable range 5 Angle adjusting screw 0 0 8 0 1 e l g e n Allowable lateral load to the piston rod end gl a n ng a ti g us in j d st a Using friction fittings makes it easier to mount the load to the piston rod end. u m dj u m a ni Mi m F: Angle adjustable range 5 u m xi Ma 0 Mi 17 nim e um gl an ad g ju in st 0 M 19

TA301

VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

IDX-OM-W023

2805 2905 35010 Rc3/4 Rc1 10mm 1 2 kg 44 47 71 kW 7.5 11 15 1ANR 2065% 2 3 30mA 4() IDU Series 6-1 6 1 IDX-OM-W023 6 IDU8E-23 IDU11E-23 IDU15E1-23 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100/100110V10%(4) AC200/200220V 10%(4) (2) A 1.7 3.0 3.2 (2) W 260 425 450 (3) 5A 10A R134a(HFC) AC100V/200V g 2805 2905 35010 Rc3/

High Pressure Coolant Valve

Rc G NPT NPTF Nil F N T None With bracket Nil B Valve type 1 3 N.C./3.5 MPa N.C./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads, FILTER REGULATOR, MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, CC, AW MASS PRO 1/8 MODULAR (NPT), .88625

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads, FILTER REGULATOR, MODULAR, AIRLINE EQUIPMENT, AW MASS PRO, CC, AW MASS PRO 1/8 MODULAR (NPT), .81840

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)

It is equivalent IP40 without cover.Built-in sensor type, External sensor type Note 3)10 years when deenergized (EEPROM)M5 female (built-in sensor type)Enclosure: POM Display: PC Gasket: NBRPanel mount adapter: POMDisplay protective cover: PCApprox. 330 g (Built-in sensor type)Approx. 345 g (External sensor type)