.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: None, Output: B (PNP Open Collector)

: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: None, Output: B

.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: None, Output: B (PNP Open Collector)

This is a legacy product, and replaced byPSE302T

Input Specification: 0 (Voltage Input), Output Specification: 4 (PNP Open Collector 2 Outputs Switching Type + Analog Current/Auto-shift Function Switching Type), Unit Specification: w/Unit Selection Function, Lead Wire: w/o Lead Wire, Bracket/Panel Mount: B (Panel Mount Adapter)

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

100

/set 14 ZL1 Series Dimensions ZL112A(N)(-B) Valve (Without supply valve or release valve) 2 x 5.3 Mounting hole ( ) Recommended tightening torque: 1.2 to 1.5 Nm 53.2 114 Vacuum (V) port Applicable tubing O.D. B Air pressure supply (P) port Applicable tubing O.D.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

02-mgp-e

MGP20-B-PS 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR MGP25-B-PS Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR MGP32-B-PS Gasket A NBR MGP40-B-PS Gasket B NBR MGP50-B-PS Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4, $5 MGP63-B-PS

One-touch Fittings

Y Applicable tubing O.D.: 4, 6 Different Diameter Straight: KQ2H Effective area [mm2] Min. port size Release button dimensions a *1 D2 Release button dimensions b L M1 M2 Applicable tubing a Applicable tubing b Applicable tubing O.D.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

With lock/226) 28 (64) Stroke 39 (4) 21 Motor cable (6) 70 58 47 6.7 17.5 Vacuum port Rc1/8 Note 3) 35 Encoder cable (7) Lock cable (4.5) Motor option B: With lock 8H9 ( ) depth 6 +0.036 0 13 n x 6.8 B 30 8H9 ( ) depth 6 +0.036 0 140 200 E C x 200 (= D) 25 Note 1) Please consult with SMC for adjusting the Z-phase detecting position at the stroke end of the end side.

PFxx-OMJ0005CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

FGE-C

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) 1. 2. 3. 1. 2. 3. 4. 4/12 FGX-OM-L009-B 1 1.5 3) 3)1 1 () 5/12 FGX-OM-L009-B FGESL Series FGESL O (P) 0.02MPa () FGE S L A:179mm FGE S V V (P11) L B:419mm FGE S L C:669mm V (V )V 50mm O .

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Air Fittings Fitting Series For Special Environment

Male elbow: KRL Inch e l b a c i l p p A . D .

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Mounted Type External Filot Type i trri--] .ZDI \ B .* ^N-_l ffiv J :FTT E \ I B N.O. N.C. I I nerer to pase@ I I I I I 4,5 Port Solenoid Pilot Operated Base Mounted Type(4 Port) Series:NVJ3OOO Port(Manifold only) ^-! + 4l/-\lF 4t/-t-\lF .

PSxx-OMM0002CN

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4.

VF1000-OMP0001

A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P 2:B 3:R2 4:A 5:R1 1:P(SUP) 2:B(CYL.1) 3:R2(EXH.1) 4:A(CYL.2) 5:R1(EXH.2) 1:P 4:A 2:B 5:R1 3:R2 EZTZDZLZMZ DC24V ) 8 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (VF1000/3000 (VF1000/3000 (VF1000/3000 (VF1000

VFR3000-OMJ0001

B-+COM-COM 1.25-31.25-3S1.25Y-3N1.25Y-3S G DC ++(-) DIN 2 1 SOLA 1 A B B + SOLB 2 3 COM B (COM) A DC AC A B + + + + A B 70 8 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 2 2 2 2 3 3 3 3 (A,B) ( ( ( (VFR3 VFR3 VFR3 VFR3 00 00 00 00) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 10 10 10 10) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 40) 40) 40) 40) VFR3 VFR3 VFR3 VFR3